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Karima Tabakkouht
at TNO
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Publications (1)
Proceedings Article | 13 November 2024 Presentation
Unveiling the individual impact of hydrogen radicals and vacuum EUV photons on pellicle-like materials under varying thermal conditions
Görsel Yetik, Herman Bekman, Jacqueline van Veldhoven, Shriparna Mukherjee, Karima Tabakkouht, Henk Lensen
Proceedings Volume PC13215, PC132150F (2024) https://doi.org/10.1117/12.3034549
KEYWORDS: Hydrogen, Extreme ultraviolet, Vacuum, Photons, Extreme ultraviolet lithography, X-ray photoelectron spectroscopy, Thin films, Scanning electron microscopy, Pellicles, Reticles
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