Dr. Katherine M. Musick Profile

Dr. Katherine M. Musick

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Publications (2)

Proceedings Article | 4 October 2023 Presentation

Fabrication of high aspect ratio structures for meta-surface optics

D. Bruce Burckel, Katherine Musick, Travis Young, Loren Gastian, John Mudrick

Proceedings Volume PC12646, PC126460T (2023) https://doi.org/10.1117/12.2678379

KEYWORDS: Fabrication, Etching, Electron beam lithography, Dielectrics, Defense and security, Silicon, Organization management, Nanotechnology, Materials processing, Lithography

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Proceedings Article | 4 March 2019 Paper

Refinements in membrane projection lithography: a route to fabrication of 3D metamaterials

Katherine Musick, D. Bruce Burckel

Proceedings Volume 10930, 1093005 (2019) https://doi.org/10.1117/12.2513632

KEYWORDS: Silicon, Polymers, Metamaterials, Scanning electron microscopy, Projection lithography, Chemical mechanical planarization, Lithography, Electron beam lithography, Etching, Microelectromechanical systems

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