Katsumi Nishimura
Team Leader at HORIBA Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 May 2007 Paper
Proceedings Volume 6607, 66071Y (2007) https://doi.org/10.1117/12.728981
KEYWORDS: Air contamination, Ions, Semiconductors, Absorption, Photomasks, Lithography, Gases, Chromatography, Optical lithography, Contamination

Proceedings Article | 20 October 2006 Paper
Proceedings Volume 6349, 63492R (2006) https://doi.org/10.1117/12.692934
KEYWORDS: Ions, Lithography, Optical lithography, Semiconductors, Chromatography, Absorption, Semiconducting wafers, Spatial light modulators, FT-IR spectroscopy, Microsoft Foundation Class Library

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