CONFERENCE PROCEEDINGS
Advanced Search
Kazuhiro Nojima
SPIE Involvement:
Author
Publications (3)
SPIE Journal Paper | 31 October 2023 Open Access
In situ electrical property quantification of memory devices by modulated electron microscopy
Muneyuki Fukuda, Kazuhisa Hasumi, Takashi Nobuhara, Hirohiko Kitsuki, Zhigang Wang, Kazuhiro Nojima, Yusaku Suzuki, Akira Hamaguchi, Masashi Kubo, Masaya Hosokawa
JM3, Vol. 22, Issue 04, 041605, (October 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041605
KEYWORDS: Modulation, Electron microscopy, Semiconducting wafers, Scanning electron microscopy, Electrical properties, Inspection, Defect detection, Scanning probe microscopy, Manufacturing, Defect inspection
DOWNLOAD PAPER
Proceedings Article | 27 April 2023 Presentation + Paper
In-situ electrical property quantification of memory devices by modulated electron microscopy
Muneyuki Fukuda, Kazuhisa Hasumi, Takashi Nobuhara, Hirohiko Kitsuki, Zhigang Wang, Kazuhiro Nojima, Yusaku Suzuki, Akira Hamaguchi, Masashi Kubo, Masaya Hosokawa
Proceedings Volume 12496, 124961O (2023) https://doi.org/10.1117/12.2658250
KEYWORDS: Modulation, Electron microscopy, Semiconducting wafers, Inspection, Defect detection, Scanning electron microscopy, Scanning probe microscopy, Electrical properties, Manufacturing, Nanometer integrated circuits, Semiconductor characterization
Proceedings Article | 22 February 2021 Presentation + Paper
In-line schematic failure analysis technique by defect SEM images
Proceedings Volume 11611, 116110M (2021) https://doi.org/10.1117/12.2583469
KEYWORDS: Computer aided design, Scanning electron microscopy, Failure analysis, Inspection, Optical inspection, Semiconductors, Machine learning, Defect detection
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top