Prof. Kazuya Yamamura Profile

Prof. Kazuya Yamamura

Associate Professor at Osaka Univ

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Author

Publications (26)

Proceedings Article | 2 October 2019 Paper

Figuring of fused silica optical surface with thin parts by plasma chemical vaporization machining

Hideo Takino, Kazuya Yamamura, Yasuhisa Sano, Yuzo Mori

Proceedings Volume 11168, 1116809 (2019) https://doi.org/10.1117/12.2532811

KEYWORDS: Plasma, Electrodes, Silica, Atmospheric plasma, Lightweight mirrors, Surface finishing, Polishing, Plasma generation, Ion beam finishing, Control systems

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Proceedings Article | 21 June 2019 Paper

Absolute distance measurement of optical path length of non-contact three-dimensional nanoprofiler based on normal vector tracing method by tandem white-light interferometer

Jungmin Kang, Takao Kitayama, Ryo Kizaki, Yui Toyoshi, Kota Hashimoto, Agustinus Winarno, Kiyoshi Takamasu, Kazuya Yamamura, Katsuyoshi Endo

Proceedings Volume 11056, 110560D (2019) https://doi.org/10.1117/12.2525071

KEYWORDS: Interferometers, Error analysis, Distance measurement, Beam splitters, Mirrors, Spherical lenses, Computer programming, Refractive index

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Proceedings Article | 28 October 2016 Paper

Research on optimal process parameters in thermally oxidation-assisted polishing of reaction-sintered silicon carbide

Xinmin Shen, Kazuya Yamamura, Xiaonan Zhang, Xiangpo Zhang, Dong Wang, Kang Peng

Proceedings Volume 9683, 96832B (2016) https://doi.org/10.1117/12.2241519

KEYWORDS: Polishing, Silicon carbide, Oxidation, Oxides, Thermal oxidation, Silicon, Surface finishing, Atomic force microscopy, Abrasives, Statistical analysis

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SPIE Journal Paper | 18 October 2016 Open Access

Preliminary study on atmospheric-pressure plasma-based chemical dry figuring and finishing of reaction-sintered silicon carbide

Xinmin Shen, Hui Deng, Xiaonan Zhang, Kang Peng, Kazuya Yamamura

OE, Vol. 55, Issue 10, 105102, (October 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.10.105102

KEYWORDS: Silicon carbide, Surface finishing, Polishing, Surface roughness, Atmospheric plasma, Oxides, Plasma, Silicon, Scanning electron microscopy, Abrasives

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Proceedings Article | 12 October 2016 Paper

Measurement of aspheric mirror by nanoprofiler using normal vector tracing

Takao Kitayama, Hiroki Shiraji, Kazuya Yamamura, Katsuyoshi Endo

Proceedings Volume 9962, 99620B (2016) https://doi.org/10.1117/12.2242408

KEYWORDS: Mirrors, Error analysis, Head, Aspheric lenses, Aspheric optics, Optical components, Synchrotron radiation, Extreme ultraviolet lithography, X-rays, Metrology

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SPIE Journal Paper | 22 October 2015 Open Access

Efficient processing of reaction-sintered silicon carbide by anodically oxidation-assisted polishing

Qunzhang Tu, Xinmin Shen, Jianzhao Zhou, Xiaohui He, Kazuya Yamamura

OE, Vol. 54, Issue 10, 105113, (October 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.10.105113

KEYWORDS: Oxidation, Polishing, Silicon carbide, Oxides, Surface finishing, Surface roughness, Scanning electron microscopy, Silicon, Optical engineering, Abrasives

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Proceedings Article | 11 October 2015 Paper

Systematic error analysis for 3D nanoprofiler tracing normal vector

Ryota Kudo, Yusuke Tokuta, Motohiro Nakano, Kazuya Yamamura, Katsuyoshi Endo

Proceedings Volume 9633, 96331B (2015) https://doi.org/10.1117/12.2196021

KEYWORDS: Error analysis, Photovoltaics, Optical components, 3D metrology, Shape analysis, Mirrors, Head, Algorithm development, Motion measurement, X-rays

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Proceedings Article | 28 September 2015 Paper

The measurement of an aspherical mirror by three-dimensional nanoprofiler

Yusuke Tokuta, Kenya Okita, Kohei Okuda, Takao Kitayama, Motohiro Nakano, Shun Nakatani, Ryota Kudo, Kazuya Yamamura, Katsuyoshi Endo

Proceedings Volume 9628, 962814 (2015) https://doi.org/10.1117/12.2191040

KEYWORDS: Mirrors, Error analysis, Head, Photovoltaics, Interferometers, Optical components, Laser optics, Synchrotron radiation, Extreme ultraviolet lithography, Lasers

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SPIE Journal Paper | 22 May 2015 Open Access

Mechanism analysis on finishing of reaction-sintered silicon carbide by combination of water vapor plasma oxidation and ceria slurry polishing

Xinmin Shen, Qunzhang Tu, Hui Deng, Guoliang Jiang, Kazuya Yamamura

OE, Vol. 54, Issue 05, 055106, (May 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.5.055106

KEYWORDS: Polishing, Silicon carbide, Plasma, Surface finishing, Oxides, Silicon, Surface roughness, Scanning electron microscopy, Radium, Oxidation

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Proceedings Article | 5 September 2014 Paper

A new optical head tracing reflected light for nanoprofiler

K. Okuda, K. Okita, Y. Tokuta, T. Kitayama, M. Nakano, R. Kudo, K. Yamamura, K. Endo

Proceedings Volume 9206, 920602 (2014) https://doi.org/10.1117/12.2061703

KEYWORDS: Mirrors, Control systems, Motion measurement, Head, Optical amplifiers, Sensors, Fizeau interferometers, Actuators, Optical components, Error analysis

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Proceedings Article | 29 August 2006 Paper

High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors

Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 6317, 631719 (2006) https://doi.org/10.1117/12.681964

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Microscopes, Spatial resolution, Visualization, Gallium, Gold, Hard x-rays, Light sources

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Proceedings Article | 29 August 2006 Paper

Surface gradient integrated profiler for x-ray and EUV optics: 3D mapping of 1m-long flat mirror and off-axis parabolic mirror

Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, H. Sano, J. Uchikoshi, K. Ueno, Y. Mori

Proceedings Volume 6317, 63170B (2006) https://doi.org/10.1117/12.680245

KEYWORDS: Mirrors, Off axis mirrors, 3D metrology, Spherical lenses, Wavefronts, Photography, Phase shifts, X-ray optics, X-rays, Reflectivity

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Proceedings Article | 17 September 2005 Paper

Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, K. Yamauchi

Proceedings Volume 5921, 59210M (2005) https://doi.org/10.1117/12.623103

KEYWORDS: Mirrors, Spatial resolution, X-rays, Particles, Multispectral imaging, Head, Hard x-rays, Interferometry, Computing systems, X-ray imaging

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Proceedings Article | 15 September 2005 Paper

A new designed ultra-high precision profiler

Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, H. Sano, K. Ueno, Y. Mori

Proceedings Volume 5921, 592107 (2005) https://doi.org/10.1117/12.617986

KEYWORDS: Mirrors, Sensors, X-rays, Interferometry, Aspheric lenses, Hard x-rays, Interferometers, Humidity, X-ray optics, EUV optics

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Proceedings Article | 31 August 2005 Paper

Hard x-ray nano-focusing at 40nm level using K-B mirror optics for nanoscopy/spectroscopy

Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5918, 591804 (2005) https://doi.org/10.1117/12.623035

KEYWORDS: Mirrors, X-rays, Tolerancing, Diffraction, Hard x-rays, X-ray optics, Microscopes, Spatial resolution, Autocollimators, X-ray microscopy

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Proceedings Article | 19 August 2005 Paper

Improvement of thickness uniformity of quartz crystal wafer by numerically controlled plasma CVM

Masafumi Shibahara, Kazuya Yamamura, Yasuhisa Sano, Tsuyoshi Sugiyama, Katsuyoshi Endo, Yuzo Mori

Proceedings Volume 5869, 58690I (2005) https://doi.org/10.1117/12.615604

KEYWORDS: Semiconducting wafers, Quartz, Electrodes, Crystals, Plasma, Atmospheric plasma, Ions, Polishing, Surface finishing, Atmospheric sciences

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Proceedings Article | 18 October 2004 Paper

Microstitching interferometry for nanofocusing mirror optics

Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Kazuya Yamamura, Yasuhisa Sano, Kazumasa Ueno, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567511

KEYWORDS: Mirrors, Interferometers, Interferometry, Fizeau interferometers, X-rays, Hard x-rays, Fringe analysis, Superposition, Stitching interferometry, Spatial resolution

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Proceedings Article | 18 October 2004 Paper

Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

Satoshi Matsuyama, Hidekazu Mimura, Kazuya Yamamura, Hirokatsu Yumoto, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Kazuto Yamauchi

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567515

KEYWORDS: Mirrors, X-rays, Hard x-rays, X-ray optics, Optical alignment, X-ray microscopy, Optical simulations, Geometrical optics, Actuators, Mirror pointing

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Proceedings Article | 18 October 2004 Paper

Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Satoshi Matsuyama, Hirokatsu Yumoto, Kazumasa Ueno, Masafumi Shibahara, Katsuyoshi Endo, Makina Yabashi, Kenji Tamasaku, Yoshinori Nishino, Tetsuya Ishikawa, Yuzo Mori

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.567501

KEYWORDS: Mirrors, Hard x-rays, X-rays, Electrodes, Head, Plasma, X-ray optics, Manufacturing, Metrology, Platinum

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Proceedings Article | 13 January 2004 Paper

Fabrication technology of hard x-ray aspherical mirror optics and application to nanospectroscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Mari Shimura, Yukihito Ishizaka

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.515127

KEYWORDS: Mirrors, X-rays, X-ray fluorescence spectroscopy, Plasma, Electrodes, X-ray optics, Beam shaping, X-ray technology, Chemical reactions, Hard x-rays

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Proceedings Article | 13 January 2004 Paper

Development of a figure correction method having spatial resolution close to 0.1 mm

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.520825

KEYWORDS: Mirrors, X-rays, X-ray imaging, Spatial resolution, X-ray technology, Optical simulations, Multispectral imaging, Particles, Interferometers, Surface finishing

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Proceedings Article | 24 December 2002 Paper

Submicron focusing of hard x-ray beam by elliptically figured mirrors for scanning x-ray microscopy

Yuzo Mori, Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Kazumasa Ueno, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453754

KEYWORDS: Mirrors, X-rays, Manufacturing, Hard x-rays, Plasma, Crystals, Gold, X-ray microscopy, Optics manufacturing, Stitching interferometry

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Proceedings Article | 24 December 2002 Paper

Aspheric surface fabrication in nanometer-level accuracy by numerically controlled plasma chemical vaporization machining (CVM) and elastic emission machining (EEM)

Kazuya Yamamura, Hidekazu Mimura, Kazuto Yamauchi, Yasuhisa Sano, Akira Saito, Takehiko Kinoshita, Katsuyoshi Endo, Yuzo Mori, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453749

KEYWORDS: Electrodes, Mirrors, Plasma, X-rays, Atmospheric plasma, Reflection, Aspheric lenses, Manufacturing, Crystals, Silicon

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Proceedings Article | 24 December 2002 Paper

Wave-optical analysis of submicron focusing of hard x-ray beams by reflective optics

Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Akira Saito, Masahiko Kanaoka, Katsuyoshi Endo, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa, Yuzo Mori

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.453752

KEYWORDS: Mirrors, X-rays, X-ray optics, Satellites, X-ray microscopy, Hard x-rays, Microscopy, Reflectivity, Wavefronts, Chromatic aberrations

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Proceedings Article | 14 November 2001 Paper

Development of plasma chemical vaporization machining and elastic emission machining systems for coherent x-ray optics

Yuzo Mori, Y. Yamauchi, Kazuya Yamamura, Hidekazu Mimura, A. Saito, H. Kishimoto, Y. Sekito, Masahiko Kanaoka, Alexei Souvorov, Makina Yabashi, Kenji Tamasaku, Tetsuya Ishikawa

Proceedings Volume 4501, (2001) https://doi.org/10.1117/12.448496

KEYWORDS: Mirrors, Plasma, X-rays, Electrodes, Head, Surface finishing, Control systems, Sensors, Optical fabrication, Chemical species

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Proceedings Article | 20 November 1996 Paper

Influence of fabrication precision on laser beam forming by fabricated optics

Koshichi Nemoto, Takashi Fujii, Naohiko Goto, Hideo Takino, Teruki Kobayashi, Norio Shibata, Kazuya Yamamura, Yuzo Mori

Proceedings Volume 2870, (1996) https://doi.org/10.1117/12.259944

KEYWORDS: Mirrors, Plasma, Gaussian beams, Laser beam propagation, Wavefronts, Surface finishing, Electrodes, Laser scattering, Scattering, Optical components

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Showing 5 of 26 publications

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