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Dr. Kenneth G. Kreider
at National Institute of Standards and Technology
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Publications (1)
Proceedings Article | 29 April 2004 Paper
Comparing the transient response of a resistive-type sensor with a thin film thermocouple during the post-exposure bake process
Kenneth Kreider, David DeWitt, Joel Fowler, James Proctor, William Kimes, Dean Ripple, Benjamin Tsai
Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.535522
KEYWORDS: Semiconducting wafers, Sensors, Thin films, Temperature metrology, Resistance, Lithography, Wafer testing, Silicon, Platinum, Data modeling
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