CONFERENCE PROCEEDINGS
Advanced Search
Kevin Matney
SPIE Involvement:
Author
Publications (3)
SPIE Journal Paper | 22 March 2023 Open Access
Inline metrology of high aspect ratio hole tilt and center line shift using small-angle x-ray scattering
JM3, Vol. 22, Issue 03, 031205, (March 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031205
KEYWORDS: Semiconducting wafers, X-rays, Metrology, Scattering, Etching, 3D modeling, Model-based design, Laser scattering, Critical dimension metrology, Nondestructive evaluation
DOWNLOAD PAPER
Proceedings Article | 26 May 2022 Presentation + Paper
Inline metrology of high aspect ratio hole tilt using small-angle x-ray scattering
Peter Gin, Matthew Wormington, Alexander Brady, Kevin Matney, Jin Zhang, Osman Sorkhabi
Proceedings Volume 12053, 1205312 (2022) https://doi.org/10.1117/12.2614312
KEYWORDS: Semiconducting wafers, X-rays, Etching, Metrology, Scattering, Calibration, Sensors, Photomasks, Electrons, Nondestructive evaluation
Proceedings Article | 31 March 2017 Paper
Materials characterization for process integration of multi-channel gate all around (GAA) devices
Gangadhara Raja Muthinti, Nicolas Loubet, Robin Chao, Abraham de la Peña, Juntao Li, Michael Guillorn, Tenko Yamashita, Sivananda Kanakasabapathy, John Gaudiello, Aron Cepler, Matthew Sendelbach, Susan Emans, Shay Wolfling, Avron Ger, Daniel Kandel, Roy Koret, Wei Ti Lee, Peter Gin, Kevin Matney, Matthew Wormington
Proceedings Volume 10145, 101451U (2017) https://doi.org/10.1117/12.2261377
KEYWORDS: Germanium, Silicon, Diffractive optical elements, Gallium arsenide, Semiconducting wafers, Etching, Solids, X-ray diffraction, X-ray fluorescence spectroscopy, Materials processing
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top