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In this study, we investigated fabrication of low-loss waveguide in fused silica by using the fundamental beam (1030nm) from an Yb solid-state femtosecond laser with a pulse duration of 250 fs. The NA of focusing objective lens was 0.42. The fabricated waveguide was made to have a circular cross-section by shaping laser beam with a slit[4]. We fixed repetition rate to 150 kHz, and identified appropriate scan speed and pulse energy for fabrication of low loss waveguide. Waveguide fabricated with appropriate condition had a propagation loss of 0.2 dB/cm, and this is the first report on optical waveguides in a fused silica fabricated by femto-second laser pulses at a wavelength of 1030nm.
[1]K. M. Davis, et. al., Opt. Lett 21, 1729(1996)
[2]J. Canning, et. al., Opt. Mater. Express 1, 998(2011)
[3]L. Shah, et. al., Opt. Express 13, 1999(2005)
[4]M. Ams, et. al., Opt. Express 13, 5676(2005)
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