In this work, a vertically stacked metal/2H-MoTe2/metal structure was fabricated to take advantage of the optical and electrical properties of two phases of MoTe2. By applying an electric-field, we triggered a reversible, non-volatile phase transition from the 2H phase to the lower-resistance 1T' phase, resulting in a resistance difference of 104 times and an 80% shift in optical reflectance, suitable for active reflective light modulation. When operated as a photodetector, its responsivities at near-infrared wavelengths around 975 nm significantly depend on its phase state, indicating its potential as an active reconfigurable photodetector.
This study conducted extensive reliability and stability tests on a fully packaged 1x12 silicon photonic MEMS switch. The switch underwent optical and electrical packaging, including electrostatic discharge (ESD) protection. Durability tests, such as endurance and hysteresis tests, were performed to assess the switch's stability with billions of cycles. Optomechanical stability was evaluated through long-term measurements of optical output powers in single-cast and multi-cast scenarios. High-speed data transmission tests and eye diagram analysis were conducted to evaluate signal integrity. This research provides valuable insights into the reliability of fully packaged silicon photonic MEMS devices and contributes to the advancement and wider adoption of this technology for commercial applications.
Silicon-based Schottky barrier photodetectors (SBPDs) have become a popular choice for near-infrared (NIR) applications due to their cost-effectiveness and compatibility with the CMOS fabrication process. This work provides a quantitative analysis of the external quantum efficiency in platinum/copper bilayer SBPDs, extending the conventional single-layer analyses. We conducted a systematic investigation of optical losses, energy distribution losses, and momentum mismatch losses, successfully matching our theoretical predictions to experimental results. Our study also demonstrates the long-term stability of bilayer SBPDs in the NIR region. These findings have significant implications for affordable NIR photodetection technologies.
We report on a 32 × 32 silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The switch is fabricated on 200-mm silicon-on-insulator wafers in a commercial complementary metal-oxide-semiconductor (CMOS) foundry. The fabricated device has a maximum on-chip loss of 7.7 dB and an extinction ratio of 50.8 dB. The switching voltage is 9.45 V and the 20-dB bandwidth is 28.7 nm. Our work shows a promising path for mass production of silicon photonic MEMS switches in commercial CMOS foundries.
Optical phased array (OPA) is considered as promising device in LiDAR application. We implemented a 1x16 silicon OPA consisting of an array of p-i-n electro-optic phase shifters and thermo-optic tunable grating radiators capable of two-dimensional beam-steering. The OPA was fabricated with CMOS-compatible process using SOI wafer. The p-i-n electro-optic phase shifters were formed in OPA channels for transversal beam-steering. With an array pitch of 2 μm, we attained transversal steering up to 45.6° at 1550 nm wavelength. For longitudinal beam-steering, we employed thermo-optic tunable grating radiators with p-i-n junction. The i-region covers whole radiator array and the p- and n-doped regions are placed on the both sides of the radiator array. This structure can provide fairly uniform heating of the radiator region, shifting the overall radiation field in longitudinal direction by the thermo-optic effect. As a result, a longitudinal beam-steering up to 10.3° was achieved by forward-biasing with a power consumption of 178 mW. This result proves a possibility of wide two-dimensional beam-steering with one-dimensional OPA without using tunable light source. We confirmed that the longitudinal tuning range obtained above is corresponding to near 100 nm wavelength tuning. Our device scheme can be a cost-effective solution of the OPA and also be a solution of self-adjustment for fluctuation of the wavelength-dependent performances.
We demonstrate an efficient coupling of guided light of 1550 nm from a standard single-mode optical fiber to a silicon waveguide using the finite-difference time-domain method and propose a fabrication method of tapered optical fibers for efficient power transfer to silicon-based photonic integrated circuits. Adiabatically-varying fiber core diameters with a small tapering angle can be obtained using the tube etching method with hydrofluoric acid and standard single-mode fibers covered by plastic jackets. The optical power transmission of the fundamental HE11 and TE-like modes between the fiber tapers and the inversely-tapered silicon waveguides was calculated with the finite-difference time-domain method to be more than 99% at a wavelength of 1550 nm. The proposed method for adiabatic fiber tapering can be applied in quantum optics, silicon-based photonic integrated circuits, and nanophotonics. Furthermore, efficient coupling within the telecommunication C-band is a promising approach for quantum networks in the future.
We report a directional-coupler-based refractive index sensor and its cost-effective fabrication method using hydrofluoric acid droplet wet-etching and surface-tension-driven liquid flows. The proposed fiber sensor consists of a pair of twisted tapered optical fibers with low excess losses. The fiber cores in the etched microfiber region are exposed to the surrounding medium for efficient interaction with the guided light. We observe that the etching-based low-loss fiber-optic sensors can measure the water droplet volume by detecting the refractive index changes of the surrounding medium around the etched fiber core region.
We present system-level characterization results of a MEMS tunable optical filter with a flat-top passband and narrow transition bands. The proposed optical bandpass filter can continuously change its optical bandwidth and center wavelength using a free-space grating and a variable-aperture MEMS reflector. We observed that the receiver sensitivity degradation is within 1 dB across the 6-dB optical passband.
In this paper we present scanning micromirrors, actuated by self-aligned, bidirectional, vertical electrostatic combdrives, for dual-axes confocal microscopy. The fabrication process, which is based on Deep Reactive Ion Etching (DRIE) of Silicon-on-insulator (SOI) wafers with two silicon device layers, requires only three lithography steps for one-dimensional scanners, while an additional two lithography steps must be performed to create two-dimensional scanners. Only front side processing is required and the two oxide layers of the double SOI wafers provide efficient and reliable etch stops. These features combined with the fact that the combs are self aligned, enable high-speed, high-resolution microscanners with stable and reliable operation as required for endoscopic implementations of confocal microscopes.
This paper describes two optical devices based on linear arrays of micro mirrors. The first is a phased array of micro mirrors that can be rotated as well as translated vertically to maintain coherence across the array. We demonstrate experimentally that such micro mirrors are capable of high-diffraction-efficiency, phased-array scanning of laser beams. The second device is a Gires- Tournois interferometer with a micro mirror array that provides tunable phase modulation for the multitude of partially reflected beams within the interferometer. We demonstrate experimentally that the MEMS-GT interferometer can operate as a tunable deinterleaver for dense Wavelength Division Multiplexed fiber optic communication.
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