Kyunghyun Kim
at SAMSUNG Electronics Co., Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 December 2022 Paper
Proceedings Volume 12293, 1229303 (2022) https://doi.org/10.1117/12.2641750
KEYWORDS: Image processing, Photomasks, Inspection, Extreme ultraviolet, Coating, Image segmentation, Image quality, Etching, Sensors, Optical inspection

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