Mr. Lars Mininni Profile

Lars Mininni

Advanced Development Systems Engineer

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Publications (3)

Proceedings Article | 1 December 2008 Paper

Improving sidewall profile metrology with enhanced 3D-AFM

Tianming Bao, Lars Mininni, Dean Dawson

Proceedings Volume 7140, 71400H (2008) https://doi.org/10.1117/12.804482

KEYWORDS: Metrology, Atomic force microscopy, Line width roughness, Line edge roughness, Scanners, Critical dimension metrology, Actuators, Silicon, Profiling, 3D metrology

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Proceedings Article | 5 April 2007 Paper

Advances in CD-AFM scan algorithm technology enable improved CD metrology

Lars Mininni, Johann Foucher, Pascal Faurie

Proceedings Volume 6518, 65183O (2007) https://doi.org/10.1117/12.713353

KEYWORDS: Line edge roughness, Line width roughness, Metrology, Critical dimension metrology, Silicon, Scanning electron microscopy, Scatterometry, Precision measurement, Photoresist materials, Scanners

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Proceedings Article | 5 April 2007 Paper

TEM validation of CD AFM image reconstruction

Gregory Dahlen, Lars Mininni, Marc Osborn, Hao-Chih Liu, Jason Osborne, Bryan Tracy, Amalia del Rosario

Proceedings Volume 6518, 651818 (2007) https://doi.org/10.1117/12.711943

KEYWORDS: Transmission electron microscopy, Atomic force microscopy, Critical dimension metrology, Image restoration, Metrology, Photomicroscopy, Calibration, Reconstruction algorithms, Feature extraction, Image processing

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