Lisa Huang
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2021 Presentation + Paper
Bradley Falch, Tony Hu, Terry Hsuan, Elvis Yang, T. Yang, K. C. Chen, Rex Cheng, Linghui Wu, John Tsai, Lisa Huang, Elsley Tan
Proceedings Volume 11614, 1161408 (2021) https://doi.org/10.1117/12.2585531
KEYWORDS: Lithography, Process modeling, Photomasks, Lead, Etching

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