The authors demonstrate a low cost direct process to directly print TiO2 grating on both planar and non-conventional substrate such as cylinder components. A well collimated i-line source emitting at a 365nm wavelength illuminates a mono layer of 1μm diameter silica microspheres deposited on a photosensitive TiO2-based sol-gel layer. No etching process is required since this layer is directly UV photo patternable like a negative photo-resist. Furthermore this thin layer offers interesting optical properties (high refractive index) and good mechanical and chemical stability. The paper describes the photochemistry of the TiO2 sol-gel layer process, the modeling of the electric field distribution below the spheres during the illumination process and preliminary results of TiO2 nanopillars of 200 nm diameter.
Design and fabrication of a high efficiency phase mask have been performed for printing submicron period gratings along 8 mm diameter glass cylinders. In this article, the authors present the radial phase mask specially designed and manufactured for a cylindrical surface micro-structuring under UV photolithography. Its period is sub-micron (480 nm < ΛPM < 720 nm). The authors describe then the phase mask based UV lithography set-up using the interference between the transmitted beams of +1 and -1 orders generated by the phase mask. Preliminary results of printed gratings on a cylinder are described on a sol-gel TiO2 thin film layer, enabling direct photo patterning on functionalized layer. The feasibility of a grating printed with a period of Λcylin = 960 nm on an 8 mm diameter cylinder with this dedicated mask has been demonstrated.
Periodic structuration of magnetic material is a way to enhance the magneto-optical behavior of optical devices like isolators. It is useful to reduce the footprint of such integrated devices or to improve their features. However, the structuration and/or integration of efficient magnetic materials on photonic platforms is still a difficult problem, because classical magneto-optical materials require an annealing temperature as high as 700°C. A novel wafer-scale approach is to incorporate that material into an already structured template through a single step deposition at low temperature. Using the dip-coating method, a magneto-optical thin film (~300nm) of CoFe2O4 nanoparticles in silica matrix prepared by sol-gel technique was coated on a 1D and 2D TiO2 subwavelength gratings. Such gratings were realized by the patterning of TiO2 films obtained by a sol-gel process. It was confirmed by Scanning Electron Microscope images that the magneto-optical composite completely occupies the voids of the 2D structuration showing a good compatibility between both materials. This composite shows a specific Faraday rotation of about 200°cm-1 at 1,5μm for 1% of volume fraction of nanoparticles. Spectral studies of the transmission and the reflection of a 1D TiO2 grating filled with the MO composite have evidenced the presence of a guided-mode optical resonance at 1,55μm. The position of this resonance was confirmed by numerical simulations, as well as its quite low efficiency. Based on simulations results, one can conclude that an increase of the grating depth is required to improve the efficiency of the resonance.
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