Makoto Yoshikawa
at Advantest Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 July 2014 Paper
Proceedings Volume 9256, 92560G (2014) https://doi.org/10.1117/12.2064944
KEYWORDS: 3D metrology, Sensors, Atomic force microscopy, 3D image processing, Scanning electron microscopy, Algorithm development, Photomasks, Metrology, Transmission electron microscopy, Time metrology

Proceedings Article | 2 April 2014 Paper
Wataru Ito, Benjamin Bunday, Sumito Harada, Aaron Cordes, Tsutomu Murakawa, Abraham Arceo, Makoto Yoshikawa, Toshihiko Hara, Takehito Arai, Soichi Shida, Masayuki Yamagata, Jun Matsumoto, Takayuki Nakamura
Proceedings Volume 9050, 90500D (2014) https://doi.org/10.1117/12.2047374
KEYWORDS: Atomic force microscopy, 3D image processing, 3D metrology, Sensors, Semiconducting wafers, Metrology, Reticles, Line edge roughness, Scanning electron microscopy

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