Prof. Maoxin Song Profile

Prof. Maoxin Song

at Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

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Author

Publications (3)

Proceedings Article | 20 November 2024 Poster + Paper

Surface-scanning scattering system for defects detection of laser gyro reflector substrate

Jun Wang, Zhenyang Li, Zhilong Xu, Huan Luo, Maoxin Song, Hengwei Qin, Wuhao Liu, Haoran Liu, Zhenhai Liu, Zhenwei Qiu, Jin Hong

Proceedings Volume 13241, 132411R (2024) https://doi.org/10.1117/12.3036138

KEYWORDS: Laser scattering, Light scattering, Gyroscopes, Defect detection, Reflectors, Optical spheres

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Proceedings Article | 20 November 2024 Poster + Paper

Rapid and precise focusing method for image-based overlay metrology

Wuhao Liu, Mingchun Ling, Maoxin Song, Hengrui Guan, Hengwei Qin, Jun Wang, Jin Hong

Proceedings Volume 13241, 132411K (2024) https://doi.org/10.1117/12.3035862

KEYWORDS: Overlay metrology, Calibration, Imaging systems, Fourier transforms, Objectives, Optical testing, Manufacturing, Interferometry

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Proceedings Article | 26 July 2024 Paper

Image interpolation methods for division of focal plane polarimeters: a review

Haoran Liu, Zhenyang Li, Xuefeng Lei, Shuming Shi, Zhenhai Liu, Maoxin Song, Zhiyuan Zhou, Zhenwei Qiu, Qiang Cong, Jin Hong

Proceedings Volume 13189, 131890G (2024) https://doi.org/10.1117/12.3032319

KEYWORDS: Interpolation, Polarization, Polarimetry, Tunable filters, Image processing, Image filtering, Polarization imaging, Image restoration, Image quality, Image interpolation

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