Mr. Marco Jähnisch Profile

Marco Jähnisch

at OFFIS

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Publications (1)

Proceedings Article | 13 October 2006 Paper

Vision feedback in an automatic nanohandling station inside an SEM

Torsten Sievers, Marco Jähnisch, Christian Schrader, Sergej Fatikow

Proceedings Volume 6376, 63760B (2006) https://doi.org/10.1117/12.684178

KEYWORDS: Microscopes, Detection and tracking algorithms, Visualization, Sensors, Image processing, Silicon, Image acquisition, Scanning electron microscopy, Volume rendering, Nanowires

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