Dr. Mario J. Paniccia Profile

Dr. Mario J. Paniccia

CEO at Anello Photonics Inc

SPIE Involvement:

Author

Publications (30)

Proceedings Article | 13 March 2024 Presentation + Paper

Passive chip-scale resonant optical gyroscope with sub-20-deg/hour/√Hz performance

Adele Zawada, Warren Jin, Nathan Abrams, Avi Feshali, Mario Paniccia, Michel J. Digonnet

Proceedings Volume 12912, 129120F (2024) https://doi.org/10.1117/12.3012146

KEYWORDS: Gyroscopes

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Proceedings Article | 17 March 2023 Presentation

Advanced high-Q resonators for next-generation frequency microcombs

Kerry Vahala, Zhiquan Yuan, Maodong Gao, QingXin Ji, Yan Yu, Leo Wu, Joel Guo, Mario Paniccia, Warren Jin, Heming Wang, John Bowers

Proceedings Volume PC12425, PC1242501 (2023) https://doi.org/10.1117/12.2656088

KEYWORDS: Resonators, Semiconductor lasers, Physics, Optical resonators, Nonlinear optics

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Proceedings Article | 8 March 2023 Presentation + Paper

High-Q silicon nitride resonator gyroscope interrogated with broadband light

Adele Zawada, Avi Feshali, Warren Jin, Nathan Abrams, Mario Paniccia, Michel J. Digonnet

Proceedings Volume 12447, 124471D (2023) https://doi.org/10.1117/12.2657332

KEYWORDS: Gyroscopes, Backscatter, Resonators, Relative intensity noise, Laser resonators, Fiber optic gyroscopes, Photons, Sagnac interferometers, Interference (communication), Waveguides

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Advancements in silicon photonics technology have resulted in significant progress toward tactical-grade chip-scale optical gyroscopes for applications such as inertial navigation for a range of self-driving vehicles. Our first generation of gyro, reported a year ago, was a resonant ring gyro fabricated with an ultra-low-loss silicon-nitride waveguide in a racetrack shape with a perimeter of 37 mm and a finesse of 1270. When the laser frequency was tuned to interrogate the resonance with the lowest backscattering coefficient, and balanced detection was implemented to reduce common noise in the two output signals, the angular random walk (ARW) was measured to be 80 deg/h/√Hz, and the gyro output was dominated by backscattering noise. The second-generation reported here utilizes a longer ring to further reduce backscattering noise. The ring resonator is a circular spiral with 33 turns, a length of 1.2 m, and a finesse of 29. When interrogated with a narrow-linewidth laser like the racetrack gyro, it has a measured ARW of 210 deg/h/√Hz dominated by laser-frequency noise. The ARW is higher than that of the racetrack gyro because the balanced detection was not as effective (13.2 dB of common noise rejection compared to 18 dB in the racetrack gyro). Tests in a vacuum indicate that environmental fluctuations do not contribute to the noise, and that most of the measured drift (3,500 deg/h) has an optical and/or electronic origin. We also report the noise performance of the racetrack gyro interrogated in a Sagnac interferometer probed with broadband light. This configuration was inspired by a recent publication from Shanghai Jiao Tong University that reports a resonant fiber optic gyroscope interrogated with broadband light with a measured ARW that meets tactical-grade requirements. The advantages of this interrogation technique are that it eliminates the need to stabilize the resonator, it reduces the component count, and by making use of incoherent light, it reduces the backscattering noise. The measured ARW of the racetrack gyro interrogated with broadband light was dominated by excess noise at large detected powers, and it was a factor of ~900 larger than the ARW of the same racetrack gyro interrogated with the laser. The reason for this increase in ARW is that the advantage of having a high-finesse resonator is lost when the ring is interrogated with broadband light, and the sensitivity is reduced by a factor of the finesse compared to the same ring resonator interrogated with a laser. This reduction in sensitivity is demonstrated experimentally. Achieving tactical-grade requirements will require returning to a laser interrogation, improving the balanced detection scheme to achieve a noise cancellation of 25 dB or better, and optimizing the laser linewidth to minimize both laser frequency noise and backscattering noise.

Proceedings Article | 3 March 2022 Presentation + Paper

Chip-scale gyroscope using silicon-nitride waveguide resonator with a Q factor of 100 million

Matthew Grant, Pierre-Baptiste Vigneron, Avi Feshali, Warren Jin, Nathan Abrams, Mario Paniccia, Michel Digonnet

Proceedings Volume 12016, 120160S (2022) https://doi.org/10.1117/12.2617219

KEYWORDS: Backscatter, Gyroscopes, Resonators, Sensors, Waveguides, Laser resonators, Interference (communication), Modulation, Signal detection, Continuous wave operation

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Proceedings Article | 15 February 2011 Paper

CMOS-compatible fabrication, micromachining, and bonding strategies for silicon photonics

John Heck, Richard Jones, Mario Paniccia

Proceedings Volume 7927, 79270U (2011) https://doi.org/10.1117/12.878499

KEYWORDS: Silicon, Etching, Silicon photonics, Semiconducting wafers, Semiconductor lasers, Waveguides, Microelectromechanical systems, Mirrors, Hybrid silicon lasers, Crystals

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Proceedings Article | 29 April 2009 Paper

Epitaxially-grown germanium/silicon avalanche photodiodes for near infrared light detection

Yimin Kang, Han-Din Liu, Mike Morse, Mario Paniccia, Moshe Zadka, Stas Litski, Gadi Sarid, Alexandre Pauchard, Ying-Hao Kuo, Hui-Wen Chen, Wissem Sfar Zaoui, John Bowers, Andreas Beling, Dion McIntosh, Xiaoguang Zheng, Joe Campbell

Proceedings Volume 7339, 733906 (2009) https://doi.org/10.1117/12.818917

KEYWORDS: Avalanche photodetectors, Silicon, Receivers, Germanium, Near infrared, Avalanche photodiodes, Absorption, Sensors, Reliability, Silicon photonics

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Proceedings Article | 25 February 2008 Paper

A monolithic integrated low-threshold Raman silicon laser

Haisheng Rong, Shengbo Xu, Oded Cohen, Omri Raday, Mindy Lee, Vanessa Sih, Mario Paniccia

Proceedings Volume 6898, 68980J (2008) https://doi.org/10.1117/12.766811

KEYWORDS: Silicon, Semiconductor lasers, Raman spectroscopy, Waveguides, Absorption, Diodes, Methane, Fabry–Perot interferometers, Silicon photonics, Laser damage threshold

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Proceedings Article | 14 February 2008 Paper

Silicon-based nonlinear optical devices for high-speed optical communications

Haisheng Rong, Simon Ayotte, Shengbo Xu, Oded Cohen, Mario Paniccia

Proceedings Volume 6892, 689216 (2008) https://doi.org/10.1117/12.762523

KEYWORDS: Silicon, Waveguides, Dispersion, Optical proximity correction, Eye, Dense wavelength division multiplexing, Absorption, Optical communications, Nonlinear optics, Signal processing

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Proceedings Article | 13 February 2008 Paper

Silicon photonic integration for high-speed applications

Ansheng Liu, Ling Liao, Doron Rubin, Juthika Basak, Yoel Chetrit, Hat Nguyen, D. Kim, Assia Barkai, Richard Jones, Nomi Elek, Rami Cohen, Nahum Izhaky, Mario Paniccia

Proceedings Volume 6898, 68980D (2008) https://doi.org/10.1117/12.767561

KEYWORDS: Silicon, Modulators, Waveguides, Silicon photonics, Multiplexers, Brain-machine interfaces, Phase shifts, Diodes, Resistors, Aluminum

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Proceedings Article | 13 February 2008 Paper

Integrated AlGaInAs-silicon evanescent racetrack laser and photodetector

Alexander Fang, Richard Jones, Hyundai Park, Oded Cohen, Omri Raday, Mario Paniccia, John Bowers

Proceedings Volume 6898, 68980M (2008) https://doi.org/10.1117/12.767564

KEYWORDS: Silicon, Photodetectors, Waveguides, Laser resonators, Semiconductor lasers, Resonators, Laser damage threshold, Sensors, Quantum wells, Polishing

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Proceedings Article | 12 February 2008 Paper

Tunable ring resonators for silicon Raman laser and amplifier applications

J. Doylend, O. Cohen, M. Lee, O. Raday, S. Xu, V. Sih, H. Rong, M. Paniccia

Proceedings Volume 6896, 68960Q (2008) https://doi.org/10.1117/12.767867

KEYWORDS: Raman spectroscopy, Resonators, Directional couplers, Tunable lasers, Silicon, Laser resonators, Waveguides, Semiconductor lasers, Laser applications, Polarization

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Proceedings Article | 8 February 2008 Paper

Integration challenges for optical inteconnects

Andrew Alduino, Hai-Feng Liu, Abazar Mireshghi, Henning Braunisch, Christine Krause, Mario Paniccia

Proceedings Volume 6899, 689910 (2008) https://doi.org/10.1117/12.767098

KEYWORDS: Optical interconnects, Optical components, Integrated optics, Computing systems, Packaging, Optical communications, Interfaces, Connectors, Signal attenuation, Copper

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Proceedings Article | 10 September 2007 Paper

Integrated AlGaInAs-silicon evanescent racetrack laser and photodetector

Alexander Fang, Richard Jones, Hyundai Park, Oded Cohen, Omri Raday, Mario Paniccia, John Bowers

Proceedings Volume 6775, 67750P (2007) https://doi.org/10.1117/12.731951

KEYWORDS: Silicon, Photodetectors, Waveguides, Laser resonators, Semiconductor lasers, Resonators, Sensors, Quantum wells, Polishing, Laser damage threshold

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Proceedings Article | 26 February 2007 Paper

High-temperature silicon evanescent lasers

John Bowers, Hyundai Park, Alexander Fang, Richard Jones, Oded Cohen, Mario Paniccia

Proceedings Volume 6485, 648515 (2007) https://doi.org/10.1117/12.714274

KEYWORDS: Silicon, Waveguides, Semiconductor lasers, Quantum wells, Resistance, Laser damage threshold, Silicon photonics, Wafer bonding, Continuous wave operation, Active optics

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Proceedings Article | 9 February 2007 Paper

Recent advances in high speed silicon optical modulator

Ansheng Liu, Ling Liao, Doron Rubin, Hat Nguyen, Berkehan Ciftcioglu, Yoel Chetrit, Rami Cohen, Nahum Izhaky, Juthika Basak, Mario Paniccia

Proceedings Volume 6477, 647710 (2007) https://doi.org/10.1117/12.703127

KEYWORDS: Silicon, Modulators, Waveguides, Phase shifts, Modulation, Phase shift keying, Data transmission, Optical modulators, Silicon photonics, Refractive index

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Proceedings Article | 8 February 2007 Paper

Monolithic integrated ring resonator Raman silicon laser and amplifier

Haisheng Rong, Shengbo Xu, Yin-Hao Kuo, Vanessa Sih, Oded Cohen, Omri Raday, Mario Paniccia

Proceedings Volume 6485, 648511 (2007) https://doi.org/10.1117/12.714210

KEYWORDS: Resonators, Waveguides, Silicon, Raman spectroscopy, Optical amplifiers, Semiconductor lasers, Laser resonators, Absorption, Silicon photonics, Directional couplers

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Proceedings Article | 2 October 2006 Paper

Recent development on silicon-based Raman lasers and amplifiers

Haisheng Rong, Ying-Hao Kuo, Shengbo Xu, Oded Cohen, Omri Raday, Mario Paniccia

Proceedings Volume 6389, 638904 (2006) https://doi.org/10.1117/12.689338

KEYWORDS: Silicon, Waveguides, Semiconductor lasers, Raman spectroscopy, Resonators, Laser resonators, Absorption, Optical amplifiers, Silicon photonics, Amplifiers

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Proceedings Article | 20 April 2006 Paper

SOI-based monolithic integration of SiON and Si planar optical circuits

Oded Cohen, Richard Jones, Omri Raday, Alexander Fang, Nahum Izhaky, Doron Rubin, Mario Paniccia

Proceedings Volume 6183, 618313 (2006) https://doi.org/10.1117/12.662548

KEYWORDS: Silicon, Waveguides, Etching, Absorption, FT-IR spectroscopy, Reflectivity, Optical circuits, Optical lithography, Fiber Bragg gratings, Integrated optics

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Proceedings Article | 1 March 2006 Paper

Silicon-based laser, amplifier, and wavelength converter for optoelectronic integration

Haisheng Rong, Richard Jones, Ansheng Liu, Oded Cohen, Ying-Hao Kuo, Mario Paniccia

Proceedings Volume 6125, 612505 (2006) https://doi.org/10.1117/12.651476

KEYWORDS: Waveguides, Silicon, Semiconductor lasers, Raman spectroscopy, Absorption, Optical amplifiers, Spectrum analysis, Coating, Diodes, Reflectivity

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Proceedings Article | 7 February 2006 Paper

Heterogeneous integration of silicon and AlGaInAs for a silicon evanescent laser

Alexander Fang, Hyundai Park, Richard Jones, Oded Cohen, Mario Paniccia, John Bowers

Proceedings Volume 6133, 61330W (2006) https://doi.org/10.1117/12.660735

KEYWORDS: Silicon, Waveguides, Quantum wells, Semiconductor lasers, Semiconducting wafers, Wafer-level optics, Wafer bonding, Active optics, Polishing, Continuous wave operation

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Proceedings Article | 18 August 2005 Paper

Characterization of a silicon Raman laser

Haisheng Rong, Richard Jones, Ansheng Liu, Oded Cohen, Dani Hak, Mario Paniccia

Proceedings Volume 5931, 59310R (2005) https://doi.org/10.1117/12.618248

KEYWORDS: Waveguides, Silicon, Semiconductor lasers, Raman spectroscopy, Absorption, Coating, Spectrum analysis, Laser resonators, Reflectivity, Continuous wave operation

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Proceedings Article | 7 March 2005 Paper

Enhanced polarization-independent optical ring resonators on silicon-on-insulator

William Headley, Graham Reed, Frederic Gardes, Ansheng Liu, Mario Paniccia

Proceedings Volume 5730, (2005) https://doi.org/10.1117/12.590354

KEYWORDS: Waveguides, Polarization, Resonators, Modeling, Silicon, Directional couplers, Etching, Telecommunications, Silicon photonics, Switches

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Proceedings Article | 7 March 2005 Paper

Recent development in silicon photonics: 2.5 Gb/s silicon optical modulator and silicon Raman laser

Ansheng Liu, Ling Liao, Haisheng Rong, Richard Jones, Dean Samara-Rubio, Doron Rubin, Rami Cohen, Oded Cohen, Dani Hak, Thorkild Franck, Ulrich Keil, Mario Paniccia

Proceedings Volume 5730, (2005) https://doi.org/10.1117/12.593692

KEYWORDS: Silicon, Waveguides, Semiconductor lasers, Raman spectroscopy, Modulators, Oxides, Reflectivity, Diodes, Silicon photonics, Continuous wave operation

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Proceedings Article | 31 January 2005 Paper

Silicon photonics: applications, recent results, and integration challenges as they relate to CMOS processing--an industry perspective

Oded Cohen, Mike Salib, Mike Morse, Mario Paniccia

Proceedings Volume 5624, (2005) https://doi.org/10.1117/12.583066

KEYWORDS: Silicon, Waveguides, Silicon photonics, Etching, Integrated optics, Optics manufacturing, Semiconducting wafers, Manufacturing, Packaging, Optical components

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Proceedings Article | 18 August 2004 Paper

Polarization-independent optical ring resonators on silicon-on-insulator

William Headley, Graham Reed, Ansheng Liu, Mario Paniccia, Simon Howe

Proceedings Volume 5451, (2004) https://doi.org/10.1117/12.546536

KEYWORDS: Resonators, Polarization, Waveguides, Silicon, Dense wavelength division multiplexing, Directional couplers, Etching, Modeling, Oxides, Switches

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Proceedings Article | 18 August 2004 Paper

Optical characterization of 1-GHz silicon-based optical modulator

Richard Jones, Ling Liao, Ansheng Liu, Mike Salib, Doron Rubin, Oded Cohen, Dean Samara-Rubio, Mario Paniccia

Proceedings Volume 5451, (2004) https://doi.org/10.1117/12.565628

KEYWORDS: Silicon, Waveguides, Oxides, Phase shifts, Optical modulators, Molybdenum, Polarization, Capacitors, Modulators, Doping

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Proceedings Article | 1 July 2004 Paper

Fabrication of optical ring resonators in silicon on insulator

William Headley, Graham Reed, Ansheng Liu, Oded Cohen, D. Hak, Mario Paniccia, Simon Howe, Inga Huille

Proceedings Volume 5357, (2004) https://doi.org/10.1117/12.527420

KEYWORDS: Waveguides, Resonators, Polarization, Silicon, Modeling, Etching, Directional couplers, Data modeling, Dense wavelength division multiplexing, Telecommunications

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