Prof. Masaharu Shiratani Profile

Prof. Masaharu Shiratani

at Kyushu Univ

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Author

Publications (5)

Proceedings Article | 13 November 2024 Poster

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Tomita, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Takashi Toshima, Hiroki Kondo, Takuji Sakamoto, Tanemasa Asano, Masaharu Shiratani, Atsushi Sunahara

Proceedings Volume PC13215, PC132150T (2024) https://doi.org/10.1117/12.3034536

KEYWORDS: Extreme ultraviolet, Plasma, Extreme ultraviolet lithography, Carbon dioxide lasers, Semiconductor manufacturing, Light sources, Tin, High volume manufacturing, Semiconductors, Lithography

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Proceedings Article | 10 April 2024 Presentation

Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing II

Hakaru Mizoguchi, Kentaro Toita Tomita, Masaharu Shiratani, Daisuke Nakamura, Yukihiro Yamagata, Takeshi Higashiguchi, Atsushi Sunahara

Proceedings Volume PC12953, PC129530Q (2024) https://doi.org/10.1117/12.3010018

KEYWORDS: Extreme ultraviolet, Plasma, Semiconductor manufacturing, Carbon dioxide lasers, Tin, Semiconductors, Scattering, Pulsed laser operation, Magnetism, Magnetic semiconductors

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Proceedings Article | 13 March 2015 Paper

ZnO-based semiconductors with tunable band gap for solar sell applications

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proceedings Volume 9364, 93640P (2015) https://doi.org/10.1117/12.2078114

KEYWORDS: Quantum wells, Zinc oxide, Solar cells, Solar energy, Semiconductors, Indium gallium nitride, Indium gallium arsenide, Optical simulations, Thin films, Crystals

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SPIE Journal Paper | 27 August 2014 Open Access

Off-axis sputter deposition of ZnO films on c-sapphire substrates by utilizing nitrogen-mediated crystallization method

Naho Itagaki, Kazunari Kuwahara, Koichi Matsushima, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani

OE, Vol. 53, Issue 08, 087109, (August 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.8.087109

KEYWORDS: Zinc oxide, Crystals, Sputter deposition, Sapphire, Particles, Oxygen, Ions, Gallium nitride, Argon, Luminescence

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Proceedings Article | 8 March 2014 Paper

Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

Proceedings Volume 8987, 89871A (2014) https://doi.org/10.1117/12.2041081

KEYWORDS: Zinc oxide, Sputter deposition, Crystals, Sapphire, Gallium nitride, Nitrogen, Oxygen, Ions, Luminescence, Light emitting diodes

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