Dr. Massimo Gagliardi Profile

Dr. Massimo Gagliardi

at Istituto per la Microelettronica e Microsistemi

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Publications (3)

Proceedings Article | 20 February 2007 Paper

Fabrication and characterization of zinc oxide based rib waveguide

M. Gioffrè, M. Gagliardi, M. Casalino, G. Coppola, M. Iodice, F. Della Corte

Proceedings Volume 6474, 64741H (2007) https://doi.org/10.1117/12.700299

KEYWORDS: Zinc oxide, Oxygen, Waveguides, Thin films, Refractive index, Etching, Crystals, Silicon films, Silicon, Glasses

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Proceedings Article | 28 April 2006 Paper

Interferometric measurement of thickness of silicon nitride layer in bi-morph silicon MEMS

P. Ferraro, M. Paturzo, S. De Nicola, A. Finizio, G. Pierattini, G. Coppola, M. Iodice, V. Striano, M. Gagliardi

Proceedings Volume 6188, 61880R (2006) https://doi.org/10.1117/12.664096

KEYWORDS: Silicon, Digital holography, Microelectromechanical systems, Interferometry, Data modeling, Microscopes, Holography, 3D image reconstruction, Sensors, Holograms

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Proceedings Article | 7 March 2005 Paper

All-optical modulation in thin film silicon-based waveguiding structures

Francesco Della Corte, Massimo Gagliardi, Krzysztof Malecki, Maria Arcangela Nigro, Caterina Summonte

Proceedings Volume 5730, (2005) https://doi.org/10.1117/12.590574

KEYWORDS: Absorption, Modulation, Waveguides, Amorphous silicon, Doping, Silicon, Infrared radiation, Visible radiation, Carbon, Photons

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