Matthias Schumann
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 September 2019 Paper
Proceedings Volume 11109, 1110902 (2019) https://doi.org/10.1117/12.2531613
KEYWORDS: Calibration, Autocollimators, Distance measurement, Charge-coupled devices, Reticles, CCD cameras, Objectives, Metrology, Mirrors, Beam splitters

Proceedings Article | 9 September 2019 Paper
V. Heikkinen, V. Byman, M. Shpak, R. Geckeler, A. Just, M. Krause, M. Schumann, A. Lassila
Proceedings Volume 11109, 1110903 (2019) https://doi.org/10.1117/12.2531023
KEYWORDS: Autocollimators, Calibration, Interferometers, Reflectors, Interferometry, Mirrors, Sensors, Metrology

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