Dr. Maxim Korytov
at imec
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 27 July 2021
JM3, Vol. 20, Issue 03, 031010, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.031010
KEYWORDS: Pellicles, Extreme ultraviolet lithography, Extreme ultraviolet, Raman spectroscopy, Scanners, Carbon, Carbon nanotubes, Plasma, Particles, Coating

Proceedings Article | 23 March 2021 Presentation + Paper
Proceedings Volume 11609, 116090Y (2021) https://doi.org/10.1117/12.2584519
KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon nanotubes, Scanners, Plasma, Thermography, Photomask technology, Hydrogen, Spectroscopy

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