CONFERENCE PROCEEDINGS
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Michael Linnane
at GLOBALFOUNDRIES Inc
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Publications (3)
Proceedings Article | 29 March 2013 Paper
Strategy for yield improvement with sub-10nm photochemical filtration
J. Braggin, C. Brodsky, M. Linnane, P. Klymko
Proceedings Volume 8682, 868229 (2013) https://doi.org/10.1117/12.2011478
KEYWORDS: Yield improvement, Digital filtering, Lithography, Back end of line, Optical lithography, Chemistry, Manufacturing, Metrology, Etching, Optics manufacturing
Proceedings Article | 29 March 2006 Paper
Use of direct washing of chemical dispense nozzle for defect control
Michael Linnane, George Mack, Christopher Longstaff, Thomas Winter
Proceedings Volume 6153, 61533D (2006) https://doi.org/10.1117/12.656534
KEYWORDS: Semiconducting wafers, Photoresist materials, Contamination, Fermium, Frequency modulation, Coating, Wafer testing, Manufacturing, Statistical analysis, Industrial chemicals
Proceedings Article | 29 March 2006 Paper
A universal process development methodology for complete removal of residues from 300mm wafer edge bevel
Mai Randall, Michael Linnane, Chris Longstaff, Kenichi Ueda, Tom Winter
Proceedings Volume 6153, 61533C (2006) https://doi.org/10.1117/12.656524
KEYWORDS: Semiconducting wafers, Fermium, Frequency modulation, Inspection, Tolerancing, Photoresist processing, Lithography, Manufacturing, Contamination, Chemistry
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