Dr. Michael Wagner Profile

Dr. Michael Wagner

at Fraunhofer-Institut für Photonische Mikrosysteme

SPIE Involvement:

Author

Publications (21)

Proceedings Article | 12 July 2023 Open Access

Open Access

Paper

Towards a spatial light modulator technology for space applications: performance analysis under the environmental conditions

Sara Francés González, Dirk Berndt, Guzmán Borque Gallego, Donato Borrelli, Ulrike Dauderstädt, Peter Dürr, Markus Eckert, Jörg Heber, Detlef Kunze, Christophe Pache, Giuseppe Pilato, Valentina Raimondi, Enrico Suetta, Hannes Torlee, Antoine Ummel, Michael Wagner

Proceedings Volume 12777, 127773U (2023) https://doi.org/10.1117/12.2690567

KEYWORDS: Vacuum chambers, Temperature metrology, Spatial light modulators, Vibration, Mirrors, Micromirrors, Vacuum, Astronomical imaging, Aerospace engineering, Windows

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Proceedings Article | 12 July 2023 Open Access

Open Access

Paper

Super-resolved compressive demonstrator for Earth Observation applications in the Medium Infrared: instrumental concept, optical design and expected performances

Valentina Raimondi, Massimo Baldi, Dirk Berndt, Tiziano Bianchi, Guzmán Borque Gallego, Donato Borrelli, Roberto Carlà, Chiara Corti, Francesco Corti, Marco Corti, Ulrike Dauderstädt, Peter Dürr, Andrea Gonnelli, Sara Francés González, Donatella Guzzi, Demetrio Labate, Nicolas Lamquin, Cinzia Lastri, Enrico Magli, Emiliano Marzi, Vanni Nardino, Christophe Pache, Lorenzo Palombi, Giuseppe Pilato, Enrico Suetta, Diego Valsesia, Michael Wagner

Proceedings Volume 12777, 1277741 (2023) https://doi.org/10.1117/12.2690634

KEYWORDS: Reconstruction algorithms, Image restoration, Image compression, Digital micromirror devices, Equipment, Infrared radiation, Spatial light modulators, Interfaces, Channel projecting optics, Super resolution

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Proceedings Article | 20 May 2022 Presentation + Paper

Presentation + Paper

Compressive sensing instrumental concepts for space applications

Valentina Raimondi, Massimo Baldi, Dirk Berndt, Tiziano Bianchi, Guzmán Borque Gallego, Donato Borrelli, Chiara Corti, Francesco Corti, Marco Corti, Ulrike Dauderstädt, Peter Dürr, Andrea Gonnelli, Sara Francés González, Donatella Guzzi, Detlef Kunze, Demetrio Labate, Nicolas Lamquin, Cinzia Lastri, Enrico Magli, Emiliano Marzi, Vanni Nardino, Christophe Pache, Lorenzo Palombi, Giuseppe Pilato, Enrico Suetta, Diego Valsesia, Michael Wagner

Proceedings Volume 12136, 121360B (2022) https://doi.org/10.1117/12.2625305

KEYWORDS: High resolution satellite images, Spatial light modulators, Sensors, Micromirrors, Compressed sensing, Data acquisition, Super resolution, Aerospace engineering, Modulation, Image compression, Infrared radiation

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Proceedings Article | 28 February 2020 Paper

Paper

Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform

A. Gehner, S. Döring, D. Rudloff, D. Kunze, P. Dürr, S. Francés, L. Hänsel, H. Torlee, A. Elgner, M. Eckert, M. Friedrichs, J. Heber, J. Schmidt, W. Pufe, C. Hohle, M. Schulze, M. Wagner

Proceedings Volume 11293, 1129302 (2020) https://doi.org/10.1117/12.2543052

KEYWORDS: Mirrors, Actuators, Micromirrors, Optical lithography, Calibration, Analog electronics, CMOS technology

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Proceedings Article | 20 March 2018 Open Access

Open Access

Paper

Advances in MOEMS technologies for high quality imaging systems

Harald Schenk, Michael Wagner, Jan Grahmann, André Merten

Proceedings Volume 10587, 1058703 (2018) https://doi.org/10.1117/12.2297399

KEYWORDS: Mirrors, Micromirrors, Scanners, Microopto electromechanical systems, Phased array optics, Coating, Analog electronics, Beam steering, Imaging systems, Laser marking

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Proceedings Article | 10 March 2015 Paper

Paper

Spatio-angular light control in microscopes using micro mirror arrays

F. Rückerl, S. Bellow, D. Berndt, J-Y. Tinevez, Jörg Heber, M. Wagner, S. Shorte

Proceedings Volume 9305, 93052Y (2015) https://doi.org/10.1117/12.2079466

KEYWORDS: Micromirrors, Mirrors, Optogenetics, Spatial light modulators, Microscopy, Neodymium, Microscopes, Ions, Control systems, Objectives

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Proceedings Article | 27 February 2015 Paper

Paper

Spatially resolved contrast measurement of diffractive micromirror arrays

Cornelius Sicker, Jörg Heber, Dirk Berndt, Florian Rückerl, Jean-Yves Tinevez, Spencer Shorte, Michael Wagner, Harald Schenk

Proceedings Volume 9375, 93750D (2015) https://doi.org/10.1117/12.2076921

KEYWORDS: Micromirrors, Diffraction, Scatter measurement, Mirrors, Light scattering, Cameras, Sensors, Interferometry, CCD cameras, Stray light

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Proceedings Article | 7 March 2014 Paper

Paper

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt, Ulrike Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, Torbjorn Sandstrom

Proceedings Volume 8977, 89770O (2014) https://doi.org/10.1117/12.2036533

KEYWORDS: Spatial light modulators, Mirrors, Modulation, Imaging systems, Copper, Electrodes, Silica, Laser applications, Semiconductor lasers, Laser processing

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Proceedings Article | 16 February 2012 Paper

Paper

One-dimensional light modulator

S. Sinning, I. Wullinger, J.-U. Schmidt, M. Friedrichs, U. Dauderstädt, S. Wolschke, T. Hughes, D. Pahner, M. Wagner

Proceedings Volume 8252, 82520H (2012) https://doi.org/10.1117/12.906651

KEYWORDS: Mirrors, Modulators, Micromirrors, Electrodes, Laser applications, Continuous wave operation, Surface properties, Reflectivity, Microopto electromechanical systems, Printed circuit board testing

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Proceedings Article | 14 February 2011 Paper

Paper

In situ surface topography measurement of MOEMS structures under laser exposure

Alexander Mai, Mathias Krellmann, Steffen Sinning, Steffen Wolschke, Ulrike Dauderstädt, Harald Schenk, Dieter Schmeißer, Michael Wagner

Proceedings Volume 7930, 793010 (2011) https://doi.org/10.1117/12.877062

KEYWORDS: Mirrors, Micromirrors, Interferometers, Spatial light modulators, In situ metrology, Microopto electromechanical systems, Error analysis, Interferometry, Objectives, Phase shifts

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Proceedings Article | 14 May 2010 Paper

Paper

Multispectral characterization of diffractive micromirror arrays

Dirk Berndt, Jörg Heber, Steffen Sinning, Detlef Kunze, Jens Knobbe, Jan-Uwe Schmidt, Martin Bring, Dirk Rudloff, Martin Friedrichs, Jana Rössler, Mark Eckert, Wolfram Kluge, Hannes Neumann, Michael Wagner, Hubert Lakner

Proceedings Volume 7718, 77180Q (2010) https://doi.org/10.1117/12.854382

KEYWORDS: Mirrors, Micromirrors, Reflectivity, Diffraction, Imaging systems, Cameras, Homogenization, Deep ultraviolet, Laser sources, Spherical lenses

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Proceedings Article | 14 May 2010 Paper

Paper

Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range

J.-U. Schmidt, M. Bring, J. Heber, M. Friedrichs, D. Rudloff, J. Rößler, D. Berndt, H. Neumann, W. Kluge, M. Eckert, M. List, M. Müller, M. Wagner

Proceedings Volume 7716, 77162L (2010) https://doi.org/10.1117/12.855750

KEYWORDS: Mirrors, Actuators, Electronics, Metals, Micromirrors, Deep ultraviolet, Control systems, Near infrared, Reflectivity, Electron beam lithography

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Proceedings Article | 5 February 2010 Paper

Paper

Temperature measurement on MOEMS micromirror plates under illumination

Ingo Wullinger, Dirk Rudloff, Klaus Lukat, Peter Dürr, Mathias Krellmann, Detlef Kunze, Aravind Narayana Samy, Ulrike Dauderstädt, Michael Wagner

Proceedings Volume 7592, 75920P (2010) https://doi.org/10.1117/12.842066

KEYWORDS: Mirrors, Temperature metrology, Convection, Micromirrors, Microopto electromechanical systems, Resistors, Calibration, Resistance, Photonic microstructures, Microsystems

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Proceedings Article | 19 February 2009 Paper

Paper

Advances in SLM development for microlithography

Ulrike Dauderstädt, Per Askebjer, Peter Björnängen, Peter Dürr, Martin Friedrichs, Matthias List, Dirk Rudloff, Jan-Uwe Schmidt, Michael Müller, Michael Wagner

Proceedings Volume 7208, 720804 (2009) https://doi.org/10.1117/12.810787

KEYWORDS: Mirrors, Spatial light modulators, Electrodes, Optical lithography, Micromirrors, Laser systems engineering, Actuators, Aluminum, Deep ultraviolet, Dielectrics

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SPIE Journal Paper | 1 April 2008

Charging effects in micromirror spatial light modulators

Ulrike Dauderstädt, Peter Duerr, Steffen Sinning, Ingo Wullinger, Michael Wagner

JM3, Vol. 7, Issue 02, 021011, (April 2008) https://doi.org/10.1117/12.10.1117/1.2911021

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Deep ultraviolet, Oxides, Actuators, Analog electronics, Titanium, Silicon

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Proceedings Article | 30 October 2007 Paper

Paper

Contrast properties of spatial light modulators for microlithography

J. Heber, D. Kunze, P. Dürr, D. Rudloff, M. Wagner, P. Björnängen, J. Luberek, U. Berzinsh, T. Sandström, T. Karlin

Proceedings Volume 6730, 673035 (2007) https://doi.org/10.1117/12.747015

KEYWORDS: Mirrors, Micromirrors, Optical lithography, Diffraction, Reflectivity, Photomasks, Microelectromechanical systems, Surface roughness, Deep ultraviolet, Microopto electromechanical systems

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Proceedings Article | 14 February 2007 Paper

Paper

AO SLM demonstration system and test bed

Michael Wildenhain, Jens Knobbe, Andreas Gehner, Michael Wagner, Hubert Lakner

Proceedings Volume 6467, 64670E (2007) https://doi.org/10.1117/12.702338

KEYWORDS: Modulation transfer functions, Adaptive optics, Spatial light modulators, Wavefronts, Mirrors, Microelectromechanical systems, Monochromatic aberrations, Spatial frequencies, Imaging systems, Micromirrors

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Proceedings Article | 19 January 2007 Paper

Paper

Charging effects in spatial light modulators based on micromirrors

Ulrike Dauderstädt, Thor Bakke, Peter Dürr, Steffen Sinning, Ingo Wullinger, Michael Wagner, Hubert Lakner

Proceedings Volume 6463, 64630J (2007) https://doi.org/10.1117/12.700331

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Oxides, Deep ultraviolet, Micromirrors, Actuators, Titanium, Silicon, Aluminum

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Proceedings Article | 23 January 2006 Paper

Paper

Global flatness of spatial light modulators

Michael Wagner, Ulrich Künzelmann, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 611404 (2006) https://doi.org/10.1117/12.644580

KEYWORDS: Adhesives, Spatial light modulators, Optical spheres, Photomasks, Mirrors, Packaging, Semiconducting wafers, Microsystems, Micromirrors, Micro cutting

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Proceedings Article | 23 January 2006 Paper

Paper

Micro-actuator with extended analog deflection at low drive voltage

Peter Dürr, Andreas Gehner, Jan Schmidt, Detlef Kunze, Michael Wagner, Hubert Lakner

Proceedings Volume 6114, 61140I (2006) https://doi.org/10.1117/12.645826

KEYWORDS: Actuators, Electrodes, Mirrors, Capacitors, Analog electronics, Electronics, Finite element methods, Chemical elements, Safety, Electromagnetism

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Proceedings Article | 6 January 2006 Paper

Paper

Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation

Mathias Krellmann, Martin Friedrichs, Ulrike Dauderstädt, Michael Wagner, Hubert Lakner

Proceedings Volume 6111, 611109 (2006) https://doi.org/10.1117/12.647358

KEYWORDS: Ultraviolet radiation, Aluminum, Microopto electromechanical systems, Excimer lasers, Interferometers, Semiconductors, Lithography, Materials processing, Laser ablation, Mirror structures

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Showing 5 of 21 publications

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