Dr. Miho Shimada Profile

Dr. Miho Shimada

at High Energy Accelerator Research Organization KEK

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 26 August 2024 Paper

Research and development of the EUV-FEL light source for lithography

Norio Nakamura, Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yoshinori Tanimoto, Yosuke Honda, Miho Shimada, Masahiro Yamamoto, Takanori Tanikawa, Olga Tanaka, Takashi Obina, Shinichiro Michizono, Hiroshi Kawata

Proceedings Volume 13177, 131770L (2024) https://doi.org/10.1117/12.3033966

KEYWORDS: Free electron lasers, Light sources, Lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Power consumption, Polarization, Polarization control, Scanners, Tin

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Proceedings Article | 13 June 2022 Poster + Presentation

Construction and commissioning of cERL IR-FEL for realizing the EUV-FEL for future lithography

Norio Nakamura, Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Takashi Obina, Hiroshi Kawata

Proceedings Volume PC12051, PC120510S (2022) https://doi.org/10.1117/12.2613617

KEYWORDS: Lithography, Free electron lasers, Extreme ultraviolet, Stochastic processes, Physics, Optical resonators, Machine learning, Light sources, Laser development, Infrared radiation

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Proceedings Article | 30 September 2021 Presentation

Demonstration of proof of concept of the EUV-FEL for future lithography

Norio Nakamura, Ryokou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Takashi Obina, Hiroshi Kawata

Proceedings Volume 11854, 118540M (2021) https://doi.org/10.1117/12.2600782

KEYWORDS: Free electron lasers, Lithography, Light sources, Extreme ultraviolet, Optical simulations, Laser development, Extreme ultraviolet lithography, Continuous wave operation, Stochastic processes, Scanners

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Proceedings Article | 20 September 2020 Presentation

Achievement of an important milestone to realize the EUV-FEL high power light source for future lithograph

Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Norio Nakamura, Hiroshi Kawata

Proceedings Volume 11517, 115170R (2020) https://doi.org/10.1117/12.2573121

KEYWORDS: Light sources, Free electron lasers, Extreme ultraviolet lithography, Mid-IR, Photomask technology, Extreme ultraviolet, Stochastic processes, Electron beams, Mirrors, Magnetism

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SPIE Journal Paper | 20 September 2013 Open Access

Estimating the absorption coefficient of the bottom layer in four-layered turbid mediums based on the time-domain depth sensitivity of near-infrared light reflectance

Chie Sato, Miho Shimada, Yukari Tanikawa, Yoko Hoshi

JBO, Vol. 18, Issue 09, 097005, (September 2013) https://doi.org/10.1117/12.10.1117/1.JBO.18.9.097005

KEYWORDS: Picosecond phenomena, Monte Carlo methods, Reflectivity, Absorption, Photons, Head, Optical properties, Biological research, Epoxies, Near infrared spectroscopy

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SPIE Journal Paper | 1 November 2005 Open Access

Reevaluation of near-infrared light propagation in the adult human head: implications for functional near-infrared spectroscopy

Yoko Hoshi, Miho Shimada, Chie Sato, Yoshinobu Iguchi

JBO, Vol. 10, Issue 06, 064032, (November 2005) https://doi.org/10.1117/12.10.1117/1.2142325

KEYWORDS: Head, Brain, Skull, Optical properties, Near infrared, Photons, Scattering, Magnetic resonance imaging, Monte Carlo methods, Tissues

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SPIE Journal Paper | 1 November 2005 Open Access

Extraction of depth-dependent signals from time-resolved reflectance in layered turbid media

Chie Sato, Miho Shimada, Yoko Hoshi, Yukio Yamada

JBO, Vol. 10, Issue 06, 064008, (November 2005) https://doi.org/10.1117/12.10.1117/1.2136312

KEYWORDS: Reflectivity, Monte Carlo methods, Photons, Scattering, Optical properties, Head, Picosecond phenomena, Error analysis, Absorption, Diffusion

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Proceedings Article | 1 July 2004 Paper

Simple algorithm to estimate the absorption coefficients of two-layered scattering media from the spatially- and time-resolved reflectance

Miho Shimada, Yukio Yamada, Yoko Hoshi

Proceedings Volume 5321, (2004) https://doi.org/10.1117/12.529754

KEYWORDS: Reflectivity, Absorption, Scattering, Head, Brain, Monte Carlo methods, Diffusion, Refractive index, In vivo imaging, Optical properties

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SPIE Journal Paper | 1 January 2003 Open Access

Treatment of nevus using medical tattooing

Jutaro Hata, Miho Shimada, Yukio Yamada, Akiko Uchida, Masahide Itoh, Yoshio Nakayama, Toyohiko Yatagai

JBO, Vol. 8, Issue 01, (January 2003) https://doi.org/10.1117/12.10.1117/1.1528596

KEYWORDS: Skin, Absorbance, Tissue optics, Light scattering, Scattering, Absorption, Tissues, Blood, Biomedical optics, Therapeutics

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Proceedings Article | 23 May 2002 Paper

Monte Carlo simulation of NIR spectrum changes induced by variations of glucose concentration

Masatoshi Tarumi, Mitsunori Shimada, Tomoya Murakami, Mamoru Tamura, Miho Shimada, Yukio Yamada

Proceedings Volume 4624, (2002) https://doi.org/10.1117/12.468324

KEYWORDS: Glucose, Absorbance, Scattering, Absorption, Monte Carlo methods, Water, Temperature metrology, Refractive index, Blood, Optical properties

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Showing 5 of 10 publications

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