Mr. Minjong Hong Profile

Minjong Hong

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Publications (4)

Proceedings Article | 23 March 2020 Paper

A physics-driven complex valued neural network (CVNN) model for lithographic analysis

Heehwan Lee, Minjong Hong, Min Kang, Hyun Sung Park, Kyusu Ahn, Yongwoo Lee, Yongjo Kim

Proceedings Volume 11326, 113260I (2020) https://doi.org/10.1117/12.2551697

KEYWORDS: Machine learning, Neural networks, Lithography, Data modeling, Diffusion, Performance modeling, Image processing, Photomasks, Optical transfer functions, Image resolution

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Proceedings Article | 23 March 2011 Paper

Enhancing fullchip ILT mask synthesis capability for IC manufacturability

Thomas Cecil, Chris Ashton, David Irby, Lan Luan, D. H. Son, Guangming Xiao, Xin Zhou, David Kim, Bob Gleason, H. J. Lee, W. J. Sim, M. J. Hong, S. G. Jung, S. S. Suh, S. W. Lee

Proceedings Volume 7973, 79731C (2011) https://doi.org/10.1117/12.882814

KEYWORDS: Photomasks, Lithography, Optical proximity correction, Manufacturing, SRAF, Image segmentation, Inverse problems, Optimization (mathematics), Electronics, Electroluminescence

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Proceedings Article | 19 May 2008 Paper

Mask process effect aware OPC modeling

Kyoil Koo, Sooryong Lee, Jason Hwang, Daniel Beale, Matt St. John, Robert Lugg, Seunghee Baek, Munhoe Do, Junghoe Choi, Youngchang Kim, Minjong Hong

Proceedings Volume 7028, 70283E (2008) https://doi.org/10.1117/12.793122

KEYWORDS: Photomasks, Etching, Optical proximity correction, Data modeling, Semiconducting wafers, Lithography, Statistical modeling, Wafer-level optics, Process modeling, Particles

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Proceedings Article | 23 June 2000 Paper

Characteristic study of electron beam stabilization for deep-UV photoresists

Myoung-Soo Kim, Jae-Hak Choi, Chi Rho, Min-Jong Hong, Bum-Jin Jun, Myung-Goon Gil, Bong-Ho Kim, Dong-Jun Ahn, Matthew Ross, Selmer Wong

Proceedings Volume 3999, (2000) https://doi.org/10.1117/12.388365

KEYWORDS: Electron beams, Etching, Deep ultraviolet, Photoresist processing, Photoresist materials, Refraction, Semiconducting wafers, Metals, FT-IR spectroscopy, Chemical analysis

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