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Ming-chun Ling
at Univ of Science and Technology of China
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Publications (3)
Proceedings Article | 20 November 2024 Poster + Paper
Rapid and precise focusing method for image-based overlay metrology
Proceedings Volume 13241, 132411K (2024) https://doi.org/10.1117/12.3035862
KEYWORDS: Overlay metrology, Calibration, Imaging systems, Fourier transforms, Objectives, Optical testing, Manufacturing, Interferometry
Proceedings Article | 24 May 2023 Paper
Stray light simulation and suppression of high-resolution simultaneous polarization imager
Xinxin Zhao, Maoxin Song, Mingchun Ling, Yuheng Chu, Dapeng Kuang, Jin Hong
Proceedings Volume 12706, 127060X (2023) https://doi.org/10.1117/12.2683096
KEYWORDS: Stray light, Optical surfaces, Mirror surfaces, Polarization, Baffles, Mirrors, Imaging systems, Target detection, Ray tracing, Design and modelling
Proceedings Article | 12 March 2019 Paper
High-precision temperature control scheme and verification for space-borne infrared detectors
Shuang-shuang Zhu, Peng Zou, Mao-xin Song, Kai-xuan Zhao, Ming-chun Ling, Zhen-hai Liu, Zhen-wei Qiu, Jin Hong
Proceedings Volume 11023, 1102309 (2019) https://doi.org/10.1117/12.2517932
KEYWORDS: Infrared detectors, Temperature metrology, Signal detection, Control systems, Infrared sensors, Infrared radiation, Polarization
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