In recent years silicon-based optoelectronic chips have great advantages in biochemical sensing due to their unique advantages. In this paper, the dispersion mechanism of a racetrack microring resonator based on a subwavelength grating waveguide is theoretically investigated, and the relationship between the electric field distributions of different parts and their parameters is studied. A highly sensitive silicon-based subwavelength grating microring resonator sensor is designed and fabricated by two-step etching photolithography process. The structure improves the sensitivity of the sensor compared with the conventional microring sensor. The resonance principle of this structure is not limited by the free spectral range due to focusing on the envelope peaks instead of individual resonance peaks. This is one of the highest refractive index sensing sensitivities reported for a microring resonator with a sensing sensitivity of 860.3 nm/RIU.
Electronic information systems are highly sensitive to electromagnetic signals, rendering them vulnerable to electromagnetic weapon attacks. The presence of metal electrodes and wires in these systems prevents them from being immune to attacks from electromagnetic weapons. This study specifically focuses on enhancing the RF signal receiving front-end, comprising a lithium niobate modulation chip and a full dielectric antenna. We utilized the finite-difference time-domain (FDTD) method to simulate and optimize the chip structure of the lithium niobate waveguide. Based on the optimization results, a two-step etching process was employed to fabricate the chip. The micro-ring in the Ku-band photonic RF front-end has been experimentally measured to possess a Q-factor of 74,000, with an instantaneous bandwidth of 2.5 GHz. This research holds significant implications for safeguarding electronic information systems against the potential damage caused by electromagnetic forces.
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