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Mingyao Li
at Univ of Washington
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Publications (1)
Proceedings Article | 25 February 2020 Paper
Aerosol jet printed PZT actuated MEMS resonating cantilever scanner
Ming-Yao Li, Kuan-Cheng Peng, Yi-Feng Hsu, Peng-Jyun Chen, Chi-Leung Tsui, Wen-Jong Wu, Wei-Chih Wang
Proceedings Volume 11283, 1128329 (2020) https://doi.org/10.1117/12.2545564
KEYWORDS: Actuators, Ferroelectric materials, Scanners, Aerosols, Microelectromechanical systems, Optical fibers, Waveguides, Finite element methods, Electrodes, Deposition processes
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