Mr. Minwook Kang Profile

Minwook Kang

at Yonsei Univ

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 17 November 2016 Paper

Improvement of photomask CD uniformity using spatially resolved optical emission spectroscopy

Junhwa Jung, Youngkeun Kim, Il-Yong Jang, Byung-Gook Kim, Chan-Uk Jeon, Minwook Kang, Changmin Lee, Jae Hahn

Proceedings Volume 9985, 99851S (2016) https://doi.org/10.1117/12.2242406

KEYWORDS: Photomasks, Etching, Plasma, Chromium, Argon, Dry etching, Chlorine, Emission spectroscopy, Critical dimension metrology, Plasma etching

Read Abstract +

Proceedings Article | 9 January 2015 Paper

A mid-IR optical emission spectrometer with a PbSe array detector for analyzing spectral characteristic of IR flares

Wondong Lee, Minwook Kang, Jae Hahn

Proceedings Volume 9444, 944415 (2015) https://doi.org/10.1117/12.2075143

KEYWORDS: Spectroscopy, Infrared spectroscopy, Mid-IR, Sensors, Infrared signatures, Detector arrays, Black bodies, Diffraction gratings, Infrared countermeasures, Infrared sensors

Read Abstract +

Proceedings Article | 9 January 2015 Paper

Development of optical inspection system for detecting malfunctions of digital micromirror device

Minwook Kang, Dong Won Kang, Wondong Lee, Jae Hahn

Proceedings Volume 9444, 944417 (2015) https://doi.org/10.1117/12.2075175

KEYWORDS: Digital micromirror devices, Image segmentation, Optical inspection, Micromirrors, Photomasks, Inspection, Mirrors, Optical lithography, Charge-coupled devices, Maskless lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years