Dr. Mira Park Profile

Dr. Mira Park

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 9 September 2013 Paper

A study of the defect detection technology using the optic simulation for the semiconductor device

Yusin Yang, Yongdeok Jeong, Mitsunori Numata, Mira Park, Mingoo Seo, SangKil Lee, ChungSam Jun, Kyupil Lee, Insoo Cho

Proceedings Volume 8880, 88801S (2013) https://doi.org/10.1117/12.2025977

KEYWORDS: Polarization, Inspection, Wafer-level optics, Defect detection, Semiconducting wafers, Optical simulations, Finite-difference time-domain method, Optical inspection, Reflectivity, Semiconductors

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