Prof. Mitsuru Ueda Profile

Prof. Mitsuru Ueda

at Tokyo Institute of Technology

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Publications (3)

Proceedings Article | 26 March 2008 Paper

High-index resist for 193-nm immersion lithography

Kazuya Matsumoto, Elizabeth Costner, Isao Nishimura, Mitsuru Ueda, C. Grant Willson

Proceedings Volume 6923, 692305 (2008) https://doi.org/10.1117/12.772958

KEYWORDS: Refractive index, Absorbance, Polymers, Absorption, Chlorine, Immersion lithography, Sulfur, Chemistry, Water, Imaging spectroscopy

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Proceedings Article | 4 May 2005 Paper

A new 193nm resist

Toshiaki Fukuhara, Taku Hirayama, Yuji Shibasaki, Shinji Ando, Mitsuru Ueda, Masayuki Endo, Masaru Sasago

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.598342

KEYWORDS: Polymers, Transparency, Photoresist materials, Magnesium, Polymerization, Infrared spectroscopy, Chlorine, Spectroscopy, Vacuum ultraviolet, Chemically amplified resists

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Proceedings Article | 4 May 2005 Paper

Development of electron beam resists based on amorphous polyphenols with low molecular weight and narrow dispersion

Taku Hirayama, Daiju Shiono, Shogo Matsumaru, Toshiyuki Ogata, Hideo Hada, Junichi Onodera, Tadashi Arai, Toshio Sakamizu, Atsuko Yamaguchi, Hiroshi Shiraishi, Hiroshi Fukuda, Mitsuru Ueda

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600416

KEYWORDS: Line edge roughness, Ions, Scanning electron microscopy, Lithography, Etching, Polymers, Electron beams, Silicon, Semiconducting wafers, Inspection

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