Dr. Muhammad Rizwan Saleem Profile

Dr. Muhammad Rizwan Saleem

at Univ of Eastern Finland

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Publications (9)

Proceedings Article | 7 March 2016 Paper

Temperature-induced changes in optical properties of thin film TiO2-Al2O3 bi-layer structures grown by atomic layer deposition

Rizwan Ali, Muhammad Rizwan Saleem, Seppo Honkanen

Proceedings Volume 9749, 97490O (2016) https://doi.org/10.1117/12.2212249

KEYWORDS: Atomic layer deposition, Thin films, Optical properties, Thermal optics, Temperature metrology, Multilayers, Oxides, Titanium, Spectroscopic ellipsometry, Environmental sensing, Titanium dioxide, Refractive index, Data modeling, Aluminum, Molecules

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Proceedings Article | 13 March 2015 Paper

Design and fabrication of sub-wavelength athermal resonant waveguide replicated gratings on different polymer substrates

Muhammad Rizwan Saleem, Rizwan Ali, Seppo Honkanen, Jari Turunen

Proceedings Volume 9374, 93740W (2015) https://doi.org/10.1117/12.2076873

KEYWORDS: Polymers, Waveguides, Temperature metrology, Optical design, Atomic layer deposition, Optical filters, Polymer multimode waveguides, Refractive index, Polymer thin films, Titanium dioxide

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Proceedings Article | 2 May 2014 Paper

Determination of thermo-optic properties of atomic layer deposited thin TiO2 films for athermal resonant waveguide gratings by spectroscopic ellipsometry

Muhammad Rizwan Saleem, Rizwan Ali, Seppo Honkanen, Jari Turunen

Proceedings Volume 9130, 91300A (2014) https://doi.org/10.1117/12.2052299

KEYWORDS: Thin films, Refractive index, Molecules, Atomic layer deposition, Thermal optics, Waveguides, Temperature metrology, Water, Spectroscopic ellipsometry, Titanium dioxide

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Proceedings Article | 7 March 2014 Paper

Mode-splitting of a non-polarizing guided mode resonance filter by substrate overetching effect

Muhammad Rizwan Saleem, Seppo Honkanen, Jari Turunen

Proceedings Volume 8974, 897417 (2014) https://doi.org/10.1117/12.2038116

KEYWORDS: Silica, Diffraction gratings, Atomic layer deposition, Waveguides, Etching, Reactive ion etching, Electron beam lithography, Optical filtering, Reflectivity, Titanium dioxide

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Proceedings Article | 5 March 2013 Paper

Nonpolarizing single layer inorganic and double layer organic-inorganic one-dimensional guided mode resonance filters

Muhammad Rizwan Saleem, Seppo Honkanen, Jari Turunen

Proceedings Volume 8613, 86130C (2013) https://doi.org/10.1117/12.2001692

KEYWORDS: Diffraction gratings, Polarization, Dielectric polarization, Atomic layer deposition, Optical design, Etching, Waveguides, Chromium, Plasma, Titanium dioxide

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Proceedings Article | 9 May 2012 Paper

Partially athermalized waveguide gratings

Muhammad Rizwan Saleem, Seppo Honkanen, Jari Turunen

Proceedings Volume 8428, 842817 (2012) https://doi.org/10.1117/12.922070

KEYWORDS: Temperature metrology, Polymers, Atomic layer deposition, Refractive index, Diffraction gratings, Waveguides, Binary data, Thermal optics, Reflectivity, Titanium dioxide

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SPIE Journal Paper | 2 March 2012

Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers

Muhammad Rizwan Saleem, Petri Stenberg, Seppo Honkanen, Jari Turunen, Muhammad Bilal Khan, Zaffar Muhammad Khan

JM3, Vol. 11, Issue 1, 013007, (March 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.013007

KEYWORDS: Etching, Silicon, Hydrogen, Reflectivity, Polymers, Nanophotonics, Photoresist processing, Electron beams, Heat treatments, Reactive ion etching

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Proceedings Article | 8 February 2012 Paper

HSQ resist for replication stamp in polymers

M. R. Saleem, P. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, J. Turunen

Proceedings Volume 8249, 82490G (2012) https://doi.org/10.1117/12.907862

KEYWORDS: Etching, Silicon, Polymers, Heat treatments, Reflectivity, Hydrogen, Electron beams, Lithography, Reactive ion etching, Semiconducting wafers

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Proceedings Article | 1 June 2011 Paper

Thermal behavior of waveguide gratings

M. Saleem, M. Khan, Z. Khan, P. Stenberg, T. Alasaarela, S. Honkanen, B. Bai, J. Turunen, P. Vahimaa

Proceedings Volume 8069, 80690A (2011) https://doi.org/10.1117/12.885708

KEYWORDS: Reflectivity, Waveguides, Polymers, Atomic layer deposition, Optical design, Thermal optics, Refractive index, Diffraction gratings, Temperature metrology, Titanium dioxide

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Showing 5 of 9 publications

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