Mr. Mycahya Eggleston Profile

Mycahya Eggleston

at Micron Technology, Inc.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 May 2022 Poster + Paper

An in-depth look at comprehensive and efficient methodology for CD uniformity budget breakdown

Ulrich Denker, Philip Gröger, Xaver Thrun, Stefan Buhl, Mycahya Eggleston, Nhi Doan, Gou Kawaguchi, Ranjan Khurana

Proceedings Volume 12053, 120531V (2022) https://doi.org/10.1117/12.2613709

KEYWORDS: Critical dimension metrology, Statistical analysis, Lithography, Error analysis, Data corrections, Visualization, Standards development, Scanners, Fluctuations and noise

Read Abstract +

Proceedings Article | 22 February 2021 Presentation + Paper

Optimizing focus and dose process windows for robust process control using a multi-feature analysis

Philip Groeger, Ranjan Khurana, Aayush Mitra, Mycahya Eggleston, Stefan Buhl, Wan-Soo Kim, Xaver Thrun

Proceedings Volume 11611, 116111E (2021) https://doi.org/10.1117/12.2583928

KEYWORDS: Process control, Finite element methods, Semiconducting wafers, Optical lithography, Semiconductors, Scanners, Logic, High volume manufacturing, Extreme ultraviolet lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years