Dr. Nadav Gutman
Research Manager at KLA Israel
SPIE Involvement:
Author | Instructor
Area of Expertise:
NZO , Overlay , Metrology , Accuracy , eBeam overlay , Optical overlay
Websites:
Profile Summary

Research interests are in optics, photonics and electromagnetism. Worked on linear and nonlinear optical problems. Currently, I'm managing a group of research scientists, developing the next generation application for both electron beam and optical metrology for the leading-edge semiconductor manufacturers.
Publications (9)

Proceedings Article | 10 April 2024 Poster + Paper
Changkyu Lee, Sumin Jang, Baikkyu Hong, Ikhyun Jeong, Sunouk Nam, Hyunsok Kim, Jaewuk Ju, Minho Jung, Mingyu Kim, Hongpeng Su, Yanan Wang, Nanglyeom Oh, Dongsub Choi, Tal Yaziv, Roie Volkovich, Nadav Gutman, Ohad Bachar, Renan Milo
Proceedings Volume 12955, 129552H (2024) https://doi.org/10.1117/12.3010101
KEYWORDS: Overlay metrology, Semiconducting wafers, Wafer level optics, Metrology, Optical gratings, Process control, Optical parametric oscillators, Time metrology, Optical alignment

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552P (2024) https://doi.org/10.1117/12.3010281
KEYWORDS: Overlay metrology, Artificial intelligence, Semiconducting wafers, Education and training, Metrology, Evolutionary algorithms, Detection and tracking algorithms, Target acquisition, Performance modeling, Optical parametric oscillators

Proceedings Article | 27 April 2023 Poster + Paper
Mordecai Kot, Yuval Lamhot, Alon Yagil, Tal Yaziv, Nadav Gutman, Renan Milo
Proceedings Volume 12496, 124963A (2023) https://doi.org/10.1117/12.2659163
KEYWORDS: Overlay metrology, Diffraction, Semiconducting wafers, Calibration, Diffraction gratings, Optical alignment, Film thickness

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12053, 120531Z (2022) https://doi.org/10.1117/12.2613981
KEYWORDS: Semiconducting wafers, Overlay metrology, Process control, Integrated circuits, Wafer-level optics, Scanners, Principal component analysis, Manufacturing, Inspection, Accuracy assessment

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12053, 120531E (2022) https://doi.org/10.1117/12.2608241
KEYWORDS: Overlay metrology, Metrology, Scatterometry, Semiconductors, Semiconductor manufacturing, Manufacturing, Inspection, Standards development

Showing 5 of 9 publications
Course Instructor
SC1350: Overlay Control: Error Budget and Metrology
This course focuses on overlay (OVL) control for product devices detailing the distinct factors affecting on-product overlay (OPO) performance. We delve into key characteristics relevant to OPO, including OVL residuals and non-zero offset (NZO). By exploring the complex, critical inter-relationships among scanner alignment schemes, after-development inspection measurements, and in-die overlay metrology, we build a foundation for better understanding and controlling OPO. Our goal is to enlighten and educate you to better optimize the OPO process for a single and multiple lithographic layers and products in your fab. The course clarifies the fundamental aspects of each metrology technique. This course will benefit those keen on comprehending the factors that shape the landscape of image-based or scatterometry-based overlay, the ongoing challenges of recipe optimization and self-referencing, the measurement and utilization of device overlay, and, most importantly, how all these elements interact and converge.
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