Dr. Neil W. Troy Profile

Dr. Neil W. Troy

Senior Systems Architect at KLA Corp

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Publications (3)

Proceedings Article | 8 October 2020 Presentation + Paper

High sensitivity repeater detection with broadband plasma optical wafer inspection for mask defect qualification

Andrew Cross, Kaushik Sah, Vidyasagar Anantha, Balarka Gupta, Ramon Ynzunza, Neil Troy, Kenong Wu, Raghav Babulnath, Meghna Rajendran, Dieter Van den Heuvel, Philippe Leray

Proceedings Volume 11517, 115170U (2020) https://doi.org/10.1117/12.2572912

KEYWORDS: Reticles, Inspection, Wafer inspection, Wafer-level optics, Photomasks, Plasma, Semiconducting wafers, Signal to noise ratio, Algorithm development, Optics manufacturing

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Proceedings Article | 9 March 2015 Paper

All-optical characterization of fs-laser induced refractive index changes in bulk and at the surface of zinc phosphate glasses

J. Hernandez-Rueda, V. Semenov, N. Troy, C. Smith, R. Brow, D. Krol

Proceedings Volume 9355, 935518 (2015) https://doi.org/10.1117/12.2077020

KEYWORDS: Glasses, Refractive index, Waveguides, Zinc, Microscopy, Near field optics, Near field, Raman spectroscopy, Aluminum, Molybdenum

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Proceedings Article | 30 January 2012 Paper

Structural modification in Er-Yb doped zinc phosphate glasses with megahertz repetition rate femtosecond pulses

Neil Troy, Luke Fletcher, Signo Reis, Richard Brow, Huan Huang, Lihmei Yang, Jian Liu, Denise Krol

Proceedings Volume 8247, 82470U (2012) https://doi.org/10.1117/12.910300

KEYWORDS: Glasses, Raman spectroscopy, Zinc, Femtosecond phenomena, Luminescence, Scanning electron microscopy, Ions, Confocal microscopy, Ytterbium, Waveguides

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