Dr. Nicolas Benoit Profile

Dr. Nicolas Benoit

Coating Technology at Carl Zeiss Sports Optics GmbH

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Author

Publications (9)

Proceedings Article | 3 September 2008 Paper

Enhanced reflectivity and stability of high-temperature LPP collector mirrors

Torsten Feigl, Sergiy Yulin, Marco Perske, Hagen Pauer, Mark Schürmann, Norbert Kaiser, Norbert Böwering, Oleg Khodykin, Igor Fomenkov, David Brandt

Proceedings Volume 7077, 70771W (2008) https://doi.org/10.1117/12.802322

KEYWORDS: Reflectivity, Mirrors, Coating, Extreme ultraviolet, Multilayers, Silicon, Molybdenum, Annealing, Interfaces, Plasma

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Proceedings Article | 21 March 2008 Paper

Scattering of EUV optics: substrate, coating, and degradation effects

Sven Schröder, Nicolas Benoit, Torsten Feigl, Angela Duparré, Andreas Tünnermann

Proceedings Volume 6921, 69212Q (2008) https://doi.org/10.1117/12.772609

KEYWORDS: Scattering, Reflectivity, Coating, Mirrors, Multilayers, Extreme ultraviolet, Interfaces, Scatter measurement, EUV optics, Autoregressive models

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Proceedings Article | 20 March 2008 Paper

Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser, Ming Fang, Manish Chandhok

Proceedings Volume 6921, 692118 (2008) https://doi.org/10.1117/12.772653

KEYWORDS: Reflectivity, Multilayers, Mirrors, Extreme ultraviolet lithography, Silicon, Carbon, Molybdenum, Extreme ultraviolet, Oxidation, Titanium dioxide

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Proceedings Article | 29 August 2006 Paper

EUV multilayer mirrors with enhanced stability

Nicolas Benoit, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 6317, 63170K (2006) https://doi.org/10.1117/12.680719

KEYWORDS: Mirrors, Reflectivity, Annealing, Silicon, Extreme ultraviolet, Multilayers, Molybdenum, Interfaces, Extreme ultraviolet lithography, Oxidation

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Proceedings Article | 24 March 2006 Paper

High-temperature LPP collector mirror

Torsten Feigl, Sergiy Yulin, Nicolas Benoit, Norbert Kaiser, Norbert Böwering, Alex Ershov, Oleh Khodykin, John Viatella, Kent Bruzzone, Igor Fomenkov, David Myers

Proceedings Volume 6151, 61514A (2006) https://doi.org/10.1117/12.662138

KEYWORDS: Mirrors, Reflectivity, Multilayers, Coating, Extreme ultraviolet, Silicon, Annealing, Atomic force microscopy, Silicon carbide, Temperature metrology

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Proceedings Article | 5 October 2005 Paper

Interface-engineered multilayer mirrors

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5963, 59630U (2005) https://doi.org/10.1117/12.624861

KEYWORDS: Reflectivity, Silicon carbide, Multilayers, Mirrors, Interfaces, Carbon, Annealing, Extreme ultraviolet lithography, Diffusion, Silicon

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Proceedings Article | 6 May 2005 Paper

High-temperature multilayers

Sergiy Yulin, Nicolas Benoit, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.617535

KEYWORDS: Multilayers, Mirrors, Reflectivity, Annealing, Silicon, Optical properties, Extreme ultraviolet, Interfaces, Transmission electron microscopy, Optical coatings

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Proceedings Article | 21 February 2005 Paper

New challenges for VUV-XUV radiation resistant coatings

Alexandre Gatto, Joerg Heber, Minghong Yang, Nicolas Benoit, Sergiy Yulin, Torsten Feigl, Norbert Kaiser

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.583583

KEYWORDS: Vacuum ultraviolet, Optical coatings, Mirrors, Micromirrors, Ultraviolet radiation, Reflectivity, Thin film coatings, Thin films, Aluminum, Optical components

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Proceedings Article | 27 January 2005 Paper

EUV/soft x-ray multilayer optics

Sergiy Yulin, Torsten Feigl, Nicolas Benoit, Norbert Kaiser

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.579520

KEYWORDS: Reflectivity, Mirrors, Multilayers, Extreme ultraviolet, Interfaces, Molybdenum, Silicon, Extreme ultraviolet lithography, X-ray optics, Sputter deposition

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Showing 5 of 9 publications

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