Norbert B. Koster
Principal Scientist
SPIE Involvement:
Author
Publications (23)

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11854, 1185414 (2021) https://doi.org/10.1117/12.2600928
KEYWORDS: Extreme ultraviolet lithography, Hydrogen, Reticles, Extreme ultraviolet, Plasma, Scanners, EUV optics, Accelerated life testing, Materials analysis, Extreme ultraviolet coatings, Contamination control

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11323, 113231Z (2020) https://doi.org/10.1117/12.2552011
KEYWORDS: Extreme ultraviolet lithography, Imaging systems, Extreme ultraviolet, Diffraction gratings, Thermography, Reflectometry, Reflectivity, Mirrors, Diagnostics, Pellicles

Proceedings Article | 26 September 2019 Paper
Proceedings Volume 11147, 1114706 (2019) https://doi.org/10.1117/12.2536531
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Photomasks, Pellicles, Temperature metrology, Mirrors, Contamination, Ruthenium

Proceedings Article | 16 October 2017 Paper
Edwin te Sligte, Michel van Putten, Freek Molkenboer, Peter van der Walle, Pim Muilwijk, Norbert Koster, Jeroen Westerhout, Peter Kerkhof, Bastiaan Oostdijck, Wouter Mulckhuyse, Alex Deutz
Proceedings Volume 10450, 1045027 (2017) https://doi.org/10.1117/12.2280356
KEYWORDS: Lifetime testing equipment, Extreme ultraviolet, Extreme ultraviolet lithography, Photomasks, Scintillators, Pellicles, Reticles, Optical testing, EUV optics, Cameras, Photodiodes

Proceedings Article | 28 September 2017 Paper
Proceedings Volume 10446, 1044603 (2017) https://doi.org/10.1117/12.2279672
KEYWORDS: Reticles, Extreme ultraviolet, Inspection, Pellicles, EUV optics, Particles, Optical coherence tomography, Photomasks, Optics manufacturing, Contamination control

Showing 5 of 23 publications
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