Dr. Oleg A. Ageev Profile

Dr. Oleg A. Ageev

at Southern Federal Univ.

SPIE Involvement:

Author

Publications (13)

Proceedings Article | 31 January 2022 Paper

Paper

Design of implantable microprobe for silicon wet bulk micromachining

Evgeny Yu. Gusev, Artur Saryev, Sofya Malokhatko, Oleg Ageev

Proceedings Volume 12157, 121570T (2022) https://doi.org/10.1117/12.2624530

KEYWORDS: Silicon, Wet etching, Electrodes, Photomasks, Bulk micromachining, Anisotropic etching, Semiconducting wafers, Nanotechnology

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Proceedings Article | 31 January 2022 Paper

Paper

Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver

Sofya Malokhatko, Evgeny Yu. Gusev, Oleg Ageev, Timofey Efimov, Evgeny Rassolov, Roman Romashko

Proceedings Volume 12157, 121570R (2022) https://doi.org/10.1117/12.2624430

KEYWORDS: Silicon, Acoustics, Fiber optics, Receivers, Interferometers, Chemical elements, Protactinium, Wet etching, Transducers, Sensors

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Proceedings Article | 31 January 2022 Paper

Paper

Formation of nanocrystalline BaTiO3 thin films by pulsed laser deposition

Zakhar Vakulov, Kseniia Korzun, Roman Tominov, Vladimir Smirnov, Oleg Ageev

Proceedings Volume 12157, 121571J (2022) https://doi.org/10.1117/12.2624410

KEYWORDS: Thin films, Ferroelectric materials, Pulsed laser deposition, Surface roughness, Scanning electron microscopy, Nanotechnology, Atomic force microscopy, Renewable energy, Pulsed laser operation, Oxygen

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Proceedings Article | 31 January 2022 Paper

Paper

Investigation of GaAs MBE growth on FIB-modified Si(100)

Mikhail Eremenko, Nikita Shandyba, Natalia Chernenko, Sergey Balakirev, Maxim Solodovnik, Oleg Ageev

Proceedings Volume 12157, 121571I (2022) https://doi.org/10.1117/12.2624404

KEYWORDS: Gallium arsenide, Silicon, Annealing, Gallium, Arsenic, Scanning electron microscopy, Ions, Crystals, Nanowires, Molecular beam epitaxy

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Proceedings Article | 15 March 2019 Paper

Paper

Effect of the sublayer material on the formation of electrical contact and the growth rate of carbon nanotubes in a low-temperature plasma using the example of Ni/Ti/Si and Fe/W/Si structures

Viktor Klimin, Alexey Rezvan, Oleg Ageev

Proceedings Volume 11022, 1102220 (2019) https://doi.org/10.1117/12.2522337

KEYWORDS: Carbon nanotubes, Thermodynamics, Plasma

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Proceedings Article | 15 March 2019 Paper

Paper

Mask formation on GaAs substrate by focused ion beams of Ga+ for plasma chemical etching

Viktor Klimin, Ivan Kots, Victoria Polyakova, Alexey Rezvan, Oleg Ageev

Proceedings Volume 11022, 110221R (2019) https://doi.org/10.1117/12.2522332

KEYWORDS: Plasma, Ion beams, Plasma etching, Gallium arsenide, Etching, Nanotechnology, Atomic force microscope

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Proceedings Article | 15 March 2019 Paper

Paper

Nanoscale planar ring-shaped matrix field emitters based on multilayer graphene/SiC

I. Jityaev, A. Svetlichnyi, O. Ageev, E. Yu. Gusev

Proceedings Volume 11022, 1102209 (2019) https://doi.org/10.1117/12.2522434

KEYWORDS: Nanoelectronics, Graphene, Silicon carbide, Multilayers, Ion beams, Nanotechnology, Nanostructures, Etching, Electronics

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Proceedings Article | 15 March 2019 Paper

Paper

Plasma deposition of carbon-silicon nanocomposite for microelectromechanical applications

Evgeny Yu. Gusev, Julia Jityaeva, Sergey Lisitsyn, Oleg Ageev

Proceedings Volume 11022, 1102224 (2019) https://doi.org/10.1117/12.2522049

KEYWORDS: High aspect ratio silicon micromachining, Nanocomposites, Silicon, Microelectromechanical systems, Nanorods, Carbon nanotubes, Plasma enhanced chemical vapor deposition, Nanotechnology

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Proceedings Article | 15 March 2019 Paper

Paper

Nanoscale profiling and memristor effect of ZnO thin films for RRAM and neuromorphic devices application

Viktor Klimin, Roman Tominov, Vadim Avilov, Denis Dukhan, Alexey Rezvan, Evgeny Zamburg, Vladimir Smirnov, Oleg Ageev

Proceedings Volume 11022, 110220E (2019) https://doi.org/10.1117/12.2522322

KEYWORDS: Zinc oxide, Lawrencium, Resistance, Pulsed laser operation, Thin films, Aluminum, Switching, Nanolithography, Photoresist materials, Nanostructures

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Proceedings Article | 15 March 2019 Paper

Paper

Influence of annealing on nanocrystalline LiNbO3 films properties

Viktor Klimin, Zakhar Vakulov, Roman Tominov, Yuriy Varzarev, Iosif Clemente, Andrew Miakonkikh, Konstantin Rudenko, Oleg Ageev

Proceedings Volume 11022, 110221E (2019) https://doi.org/10.1117/12.2522316

KEYWORDS: Annealing, Oxygen, Surface roughness, Scanning electron microscopy, Absorption, Oxides, Fabrication, Atmospheric modeling, Atmospheric optics, Acousto-optics

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Proceedings Article | 30 December 2016 Paper

Paper

A study of the vertical walls and the surface roughness GaAs after the operation in the combined plasma etching

Viktor Klimin, Maxim Solodovnik, Vladimir Smirnov, Andrey Eskov, Roman Tominov, Oleg Ageev

Proceedings Volume 10224, 102241Z (2016) https://doi.org/10.1117/12.2267120

KEYWORDS: Surface roughness, Gallium arsenide, Plasma etching, Plasma, Photoresist materials, Etching, Atomic force microscopy, Lithography, Wet etching, Nanostructures

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Proceedings Article | 30 December 2016 Paper

Paper

Investigation of memristor effect on the titanium nanowires fabricated by focused ion beam

V. Avilov, O. Ageev, I. Jityaev, A. Kolomiytsev, V. Smirnov

Proceedings Volume 10224, 102240T (2016) https://doi.org/10.1117/12.2267084

KEYWORDS: Titanium, Ion beams, Nanolithography, Nanotechnology, Atomic force microscopy, Nanowires, Resistance, Nanostructures, Lawrencium, Metals

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Proceedings Article | 30 December 2016 Paper

Paper

Resistive switching of vertically aligned carbon nanotube by a compressive strain

Marina Ilina, Yuriy Blinov, Oleg Ilin, Viktor Klimin, Oleg Ageev

Proceedings Volume 10224, 102240U (2016) https://doi.org/10.1117/12.2266762

KEYWORDS: Switching, Carbon nanotubes, Resistance, Atomic force microscopy, Nanoelectronics, Lawrencium, Scanning electron microscopy, Nanotechnology, Plasma enhanced chemical vapor deposition, Silicon

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Showing 5 of 13 publications

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