Ms. Olga Novak Profile

Olga Novak

at Applied Materials Israel, Ltd

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Publications (2)

Proceedings Article | 5 March 2021 Presentation

Advanced roughness characterization for 300mm Si photonics patterning and optimization

Remi Le Tiec, Shimon Levi, Angela Kravtsov, Olga Novak, Cecilia Dupre, Cyril Vannuffel, Tristan Dewolf, Stephanie Garcia, Quentin Wilmart, Jonathan Faugier-Tovar

Proceedings Volume 11690, 116900K (2021) https://doi.org/10.1117/12.2578550

KEYWORDS: Silicon photonics, Silicon, Photonics, Optical lithography, Line edge roughness, Wafer-level optics, Metrology, Line width roughness, Semiconducting wafers

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Proceedings Article | 8 April 2019 Paper

Macro CDSEM 2D metrology supporting advanced DRAM patterning

R. Kris, G. Klebanov, I. Schwarzband, E. Sommer, L. Gershtein, B. Mathew, E. Noifeld, S. Levy, R. Alkoken, O. Novak, H. Miroku, D. Rathore , S. Pastur, S. Duvdevani-Bar, T. Bar-On, I. Horikawa

Proceedings Volume 10959, 109592S (2019) https://doi.org/10.1117/12.2515233

KEYWORDS: Metrology, Critical dimension metrology, Process control, Scanning electron microscopy, Optical lithography, Algorithm development, Detection and tracking algorithms, Mathematical modeling, Image enhancement, Computer aided design

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