Mr. Ovadia Ilgayev Profile

Ovadia Ilgayev

Application Team Leader at Nova Ltd

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Publications (1)

Proceedings Article | 28 March 2017 Presentation + Paper

Complex metrology on 3D structures using multi-channel OCD

Taher Kagalwala, Sridhar Mahendrakar, Alok Vaid, Paul Isbester, Aron Cepler, Charles Kang, Naren Yellai, Matthew Sendelbach, Mihael Ko, Ovadia Ilgayev, Yinon Katz, Lilach Tamam, Ilya Osherov

Proceedings Volume 10145, 101451C (2017) https://doi.org/10.1117/12.2261419

KEYWORDS: 3D metrology, Metrology, Thin films, Process control, Scatterometry, Thin film devices, Semiconducting wafers, Photomasks, Chemical species, Dielectrics, Transmission electron microscopy, Diffractive optical elements, Solids, Channel projecting optics, Etching

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