Dr. Patrick Steglich Profile

Dr. Patrick Steglich

Scientist at IHP

SPIE Involvement:

Author

Area of Expertise:

Photonics , Integrated Photonics , Electro-optical modulators , Biophotonics , Optical Technologies , Optical Sensors

Websites:

Personal Website | Company Website

Patrick Steglich is a research associate at the Leibniz-Institute for Innovative Microelectronics IHP in Frankfurt (Oder), Germany. He is lecturer and guest scientist at the Technical University of Applied Sciences Wildau, Germany. He holds a master's degree in photonics from the Technical University of Applied Sciences Wildau since 2013. In 2016, he completed his PhD in photonics at Universita Roma 'Tor Vergata'. He is the author of more than 40 scientific articles and holds currently four patents in the field of photonics and optical technologies.

Proceedings Article | 11 March 2024 Presentation + Paper

Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections

Francesco Villasmunta, Patrick Steglich, Claus Villringer, Sigurd Schrader, Harald Schenk, Andreas Mai, Martin Regehly

Proceedings Volume 12892, 128920I (2024) https://doi.org/10.1117/12.3003146

KEYWORDS: Waveguides, Etching, Cryogenics, Silicon, Fabrication, Design, Semiconducting wafers, Deep reactive ion etching, Optical interconnects, 3D microstructuring, Integrated photonics, Silicon photonics, Electromagnetic simulation

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Proceedings Article | 30 June 2022 Open Access

Defining sensitivity of integrated optical biosensors: a multidisciplinary lesson approach

Patrick Steglich

Proceedings Volume 12297, 122971G (2022) https://doi.org/10.1117/12.2635553

KEYWORDS: Waveguides, Refractive index, Resonators, Microrings, Integrated optics, Sensors, Optical sensors, Biosensors, Photonic integrated circuits, Cladding

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Proceedings Article | 18 April 2021 Presentation + Paper

Analysis of BTO-on-Si-waveguides for energy-efficient electro-optical modulators

Patrick Steglich, Andreas Mai

Proceedings Volume 11775, 117750L (2021) https://doi.org/10.1117/12.2592501

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Proceedings Article | 18 April 2021 Presentation + Paper

A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing

Patrick Steglich, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael Weller, Andreas Mai

Proceedings Volume 11772, 1177206 (2021) https://doi.org/10.1117/12.2588791

KEYWORDS: Microfluidics, Silicon, Silicon photonics, Biomedical optics, Waveguides, Resonators, Biosensors, Biosensing, Wet etching, Sensors

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SPIE Journal Paper | 29 January 2021

Fiber-to-chip light coupling using a graded-index lensed fiber collimator

Siegfried Bondarenko, Marcel Hülsemann, Andreas Mai, Patrick Steglich

OE, Vol. 60, Issue 01, 014105, (January 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.1.014105

KEYWORDS: Single mode fibers, Fiber couplers, GRIN lenses, Collimators, Tolerancing, Photonic integrated circuits, Sensors, Optical engineering, Biosensors, Waveguides

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Proceedings Article | 1 April 2020 Presentation

Towards photonic biosensors in a SiGe BiCMOS technology (Conference Presentation)

Patrick Steglich, Christian Mai, Siegfried Bondarenko, Andreas Mai

Proceedings Volume 11361, 113610H (2020) https://doi.org/10.1117/12.2556496

KEYWORDS: Sensors, Biosensors, Biomedical optics, Photonic integrated circuits, Silicon, Silicon photonics, Environmental monitoring, Electronic components, Semiconductors, Point-of-care devices

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Proceedings Article | 8 March 2019 Paper

Development of tuneable Fabry-Pérot sensors for parallelised photoacoustic signal acquisition

Claus Villringer, Taravat Gilani, Edward Zhang, Silvio Pulwer, Patrick Steglich, Sigurd Schrader, Jan Laufer

Proceedings Volume 10878, 108780M (2019) https://doi.org/10.1117/12.2509437

KEYWORDS: Sensors, Polymers, Refractive index, Chromophores, Electrodes, Photoacoustic spectroscopy, Cameras, Photorefractive polymers, Homogenization, Active optics

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Proceedings Article | 4 March 2019 Paper

Endoscopic orientation by multimodal data fusion

Silvio Pulwer, Richard Fiebelkorn, Christoph Zesch, Patrick Steglich, Claus Villringer, Franccesco Villasmunta, Egbert Gedat, Jan Handrich, Sigurd Schrader, Ralf Vandenhouten

Proceedings Volume 10931, 1093114 (2019) https://doi.org/10.1117/12.2508470

KEYWORDS: Endoscopes, Endoscopy, Cameras, Filtering (signal processing), Sensors, Visualization, Data fusion, Inspection, Global Positioning System, 3D image processing

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Proceedings Article | 4 March 2019 Presentation

Raman lasers for trace gas detection (Conference Presentation)

Christoph Zesch, Silvio Pulwer, Patrick Steglich, Paolo Prosposito, Sigurd Schrader, Hans Joachim Eichler

Proceedings Volume 10902, 109021E (2019) https://doi.org/10.1117/12.2510676

KEYWORDS: Raman spectroscopy, Gas lasers, Crystals, Raman scattering, Laser crystals, Carbon dioxide lasers, LIDAR, Light emitting diodes, Laser scattering, Diamond

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Proceedings Article | 15 March 2018 Presentation

Development of tunable Fabry-Pérot polymer film sensors for parellelised photoacoustic signal acquisition (Conference Presentation)

Claus Villringer, Taravat Saeb Gilani, Sara Gehauf, Clemens Wiedenhöft, Patrick Steglich, Silvio Pulwer, Maria Richetta, Sigurd Schrader, Jan Laufer

Proceedings Volume 10494, 1049421 (2018) https://doi.org/10.1117/12.2290409

KEYWORDS: Sensors, Polymers, Polymer thin films, 3D acquisition, Ferroelectric polymers, Polymeric sensors, Photoacoustic spectroscopy, Acoustics, 3D image processing, Cameras

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Proceedings Article | 26 June 2017 Paper

Very high aspect ratio through silicon via reflectometry

J. Bauer, F. Heinrich, O. Fursenko, S. Marschmeyer, A. Bluemich, S. Pulwer, P. Steglich, C. Villringer, A. Mai, S. Schrader

Proceedings Volume 10329, 103293J (2017) https://doi.org/10.1117/12.2269957

KEYWORDS: Silicon, Reflectance spectroscopy, Reflectometry, Etching, Spectroscopy, Microelectronics, Metrology, Semiconducting wafers, Algorithm development, Critical dimension metrology, Signal to noise ratio, Reflection, Photomasks, Spectral resolution, Diffraction

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Proceedings Article | 13 May 2016 Presentation + Paper

Partially slotted silicon ring resonator covered with electro-optical polymer

Patrick Steglich, Christian Mai, David Stolarek, Stefan Lischke, Sebastian Kupijai, Claus Villringer, Silvio Pulwer, Friedhelm Heinrich, Joachim Bauer, Stefan Meister, Dieter Knoll, Mauro Casalboni, Sigurd Schrader

Proceedings Volume 9891, 98910R (2016) https://doi.org/10.1117/12.2217725

KEYWORDS: Waveguides, Silicon, Resonators, Polymers, Electro optic polymers, Electro optics, Microresonators, Nanophotonics, Silicon photonics, Cladding, Phase shift keying

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Proceedings Article | 26 April 2016 Paper

Triangulation-based 3D surveying borescope

S. Pulwer, P. Steglich, C. Villringer, J. Bauer, M. Burger, M. Franz, K. Grieshober, F. Wirth, J. Blondeau, J. Rautenberg, S. Mouti, S. Schrader

Proceedings Volume 9890, 989009 (2016) https://doi.org/10.1117/12.2225203

KEYWORDS: Imaging systems, Cameras, Optical resolution, 3D metrology, Calibration, Projection systems, Spatial frequencies, Scattering, Lens design, Environmental sensing, Inspection, Ray tracing, Computer aided design, Modulation transfer functions

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