Optical measuring methods based on the principle of structured illumination frequently apply phase shift evaluation for optical spatial coding. While these approaches allow for efficient and high-precision coding in many applications, they reach their limits in particular when different signal components are superimposed, which may occur due to multiple reflections on the workpiece surface. Therefore, in the present contribution, a novel approach in the field of structured illumination is presented, which implements spatial coding by a pattern sequence with increasing spatial frequency, based on similar approaches from the field of absolute distance interferometry. In addition to basics of the method, a first experimental result is presented, which shows that the method allows for a high-quality separation of superimposed signals.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.