Prof. Pavel A. Todua Profile

Prof. Pavel A. Todua

at JSC Ctr for Surface and Vacuum Research

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Author

Publications (22)

Proceedings Article | 20 September 2013 Paper

Advance in dimensional measurements of nano-objects based on defocusing of the electron probe of a scanning electron microscope

V. Gavrilenko, M. Filippov, V. Mityukhlyaev, A. Rakov, P. Todua

Proceedings Volume 8819, 88190D (2013) https://doi.org/10.1117/12.2023056

KEYWORDS: Video, Scanning electron microscopy, Silicon, Nanostructures, Plasma etching, Electron microscopes, Nanoparticles, Video processing, Photomasks, Gold

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Proceedings Article | 8 January 2013 Paper

Natural oxide thickness measurements on the test silicon relief pitch structure

M. Filippov, M. Ermakova, V. Gavrilenko, A. Kuzin, A. Yu Kuzin, A. Kuzmin, V. Mityukhlyaev, A. Rakov, P. Todua, A. Zablotskiy

Proceedings Volume 8700, 87000U (2013) https://doi.org/10.1117/12.2017079

KEYWORDS: Oxides, Silicon, Transmission electron microscopy, Crystals, Calibration, Chemical elements, Distance measurement, Temperature metrology, Electron microscopes, Phosphorus

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Proceedings Article | 11 October 2012 Paper

New reference material for transmission electron microscope calibration

P. Todua, A. Vasiliev, M. Kovalchuk, V. Gavrilenko, M. Filippov, V. Mityukhlyaev, A. Rakov

Proceedings Volume 8466, 84660D (2012) https://doi.org/10.1117/12.929551

KEYWORDS: Calibration, Electron microscopes, Silicon, Transmission electron microscopy, Scanning electron microscopy, Crystals, Ions, Silica, Scanning transmission electron microscopy, Carbon

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Proceedings Article | 14 May 2010 Paper

Test objects for calibration of SEMs and AFMs operating at the nanoscale

Yu Novikov, V. Gavrilenko, A. Rakov, P. Todua

Proceedings Volume 7718, 77180Y (2010) https://doi.org/10.1117/12.853892

KEYWORDS: Scanning electron microscopy, Calibration, Electron beams, Atomic force microscopy, Stereolithography, Microscopes, Silicon, Solids, Electron microscopes, Atomic force microscope

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Proceedings Article | 14 May 2010 Paper

Accuracy of ellipsometric measurements of Si-SiO2 structures

Yu. Novikov, V. Gavrilenko, P. Todua, A. Rakov

Proceedings Volume 7718, 77181B (2010) https://doi.org/10.1117/12.853898

KEYWORDS: Refractive index, Silica, Silicon films, Silicon, Ellipsometry, Semiconducting wafers, Optical testing, Mineralogy, Nanoelectronics, Systems modeling

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Proceedings Article | 21 August 2009 Paper

Measurement of thickness of native silicon dioxide with a scanning electron microscope

Yu. Novikov, A. Rakov, V. Gavrilenko, P. Todua

Proceedings Volume 7405, 740507 (2009) https://doi.org/10.1117/12.826190

KEYWORDS: Silica, Silicon, Silicon films, Scanning electron microscopy, Etching, Amorphous silicon, Electron microscopes, Semiconducting wafers, Molecules, Photomasks

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Proceedings Article | 21 August 2009 Paper

Nanoscale dimensional metrology in Russia

V. Gavrilenko, P. Todua, A. Rakov, Yu. Novikov

Proceedings Volume 7405, 740504 (2009) https://doi.org/10.1117/12.826164

KEYWORDS: Scanning electron microscopy, Atomic force microscopy, Calibration, Interferometry, 3D imaging standards, Stereolithography, 3D metrology, Crystals, Standards development, Dimensional metrology

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Proceedings Article | 22 May 2009 Paper

Test objects for automated dimensional measurements at the nanoscale level using a scanning electron microscope

M. Filippov, V. Gavrilenko, P. Todua, A. Rakov, Yu. Novikov

Proceedings Volume 7378, 737813 (2009) https://doi.org/10.1117/12.821759

KEYWORDS: Scanning electron microscopy, Electron beams, Calibration, Electron microscopes, Silica, Liquids, Stereolithography, Isotropic etching, Integrated circuits, Anisotropic etching

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Proceedings Article | 22 May 2009 Paper

Russian standards for dimensional measurements for nanotechnologies

V. Gavrilenko, P. Todua, M. Filippov, Yu. Novikov, A. Rakov

Proceedings Volume 7378, 737812 (2009) https://doi.org/10.1117/12.821760

KEYWORDS: Calibration, Scanning electron microscopy, Atomic force microscopy, Standards development, Nanotechnology, Microscopes, Metrology, Atomic force microscope, Electron microscopes, Video

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Proceedings Article | 24 March 2009 Paper

Measurement of dimensions of resist mask elements below 100 nm with help of a scanning electron microscope

E. Zhikharev, Yu. Novikov, K. Valiev, A. Orlikovsky, P. Todua, V. Kalnov, V. Gavrilenko, A. Rakov

Proceedings Volume 7272, 727227 (2009) https://doi.org/10.1117/12.814062

KEYWORDS: Scanning electron microscopy, Silicon, Photomasks, Electron microscopes, Integrated circuits, Nanostructures, Electron beams, Etching, Sensors, Atomic force microscopy

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Proceedings Article | 23 March 2009 Paper

Calibration of a scanning electron microscope in the wide range of magnifications for the microscope operation in the integrated circuit production line

Ch. Volk, V. Gavrilenko, A. Rakov, P. Todua, Yu. Novikov

Proceedings Volume 7272, 72720Z (2009) https://doi.org/10.1117/12.813514

KEYWORDS: Scanning electron microscopy, Calibration, Electron beams, Microscopes, Nanostructures, Electron microscopes, Video, Integrated circuits, Manufacturing, Photomicroscopy

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Proceedings Article | 9 September 2008 Paper

Check of the quality of fabrication of test objects with a trapezoidal profile

V. Gavrilenko, A. Rakov, P. Todua, Yu. Novikov

Proceedings Volume 7042, 704209 (2008) https://doi.org/10.1117/12.794926

KEYWORDS: Scanning electron microscopy, Atomic force microscopy, Silicon, Crystals, Anisotropic etching, Optical spheres, Electron microscopes, Atomic force microscope, Calibration, Semiconducting wafers

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Proceedings Article | 9 September 2008 Paper

Test objects with right-angled and trapezoidal profiles of the relief elements

P. Todua, V. Gavrilenko, A. Rakov, Yu. Novikov

Proceedings Volume 7042, 704208 (2008) https://doi.org/10.1117/12.794834

KEYWORDS: Scanning electron microscopy, Calibration, Atomic force microscopy, Silicon, Stereolithography, Anisotropic etching, Lithium, Crystals, Microscopes, Electron microscopes

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Proceedings Article | 9 September 2008 Paper

Measurement of the parameters of the electron beam of a scanning electron microscope

P. Todua, A. Rakov, V. Gavrilenko, Yu. Novikov

Proceedings Volume 7042, 70420C (2008) https://doi.org/10.1117/12.794891

KEYWORDS: Electron beams, Scanning electron microscopy, Video, Electron microscopes, Microscopes, Optical testing, Calibration, Solids, Lithium, Laser beam diagnostics

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Proceedings Article | 29 April 2008 Paper

Direct measurement of the linewidth of relief element on AFM in nanometer range

V. Sharonov, A. Rakov, I. Lysov, P. Todua, M. Filippov, Yu. Novikov

Proceedings Volume 7025, 702510 (2008) https://doi.org/10.1117/12.802427

KEYWORDS: Atomic force microscopy, Calibration, Scanning electron microscopy, Optical spheres, Solids, Stereolithography, Atomic force microscope, Chemical elements, Physics, Image acquisition

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Proceedings Article | 29 April 2008 Paper

Nanorelief elements in reference measures for scanning electron microscopy

V. Mityukhlyaev, M. Filippov, P. Todua, A. Rakov, Yu. Novikov, S. Darznek

Proceedings Volume 7025, 702511 (2008) https://doi.org/10.1117/12.802428

KEYWORDS: Scanning electron microscopy, Electron beams, Calibration, Anisotropic etching, Crystals, Stereolithography, Chemical elements, Semiconducting wafers, Electron microscopes, Microscopes

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Proceedings Article | 10 September 2007 Paper

Measurements of linear sizes of relief elements in the nanometer range using an atomic force microscope

V. P. Gavrilenko, Yu. A. Novikov, P. A. Todua, M. N. Filippov, A. V. Rakov

Proceedings Volume 6648, 66480S (2007) https://doi.org/10.1117/12.733520

KEYWORDS: Atomic force microscopy, Optical spheres, Calibration, Atomic force microscope, Silicon, Solids, Scanning electron microscopy, Silica, Image acquisition, Microscopes

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Proceedings Article | 10 September 2007 Paper

Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope

P. A. Todua, V. P. Gavrilenko, M. N. Filippov, A. V. Rakov, Yu. A. Novikov

Proceedings Volume 6648, 66480T (2007) https://doi.org/10.1117/12.733566

KEYWORDS: Scanning electron microscopy, Electron beams, Calibration, Electron microscopes, Microscopes, Silicon, Chemical elements, Metrology, Distance measurement, Optical testing

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Proceedings Article | 10 September 2007 Paper

Silicon test object of the linewidth of the nanometer range for SEM and AFM

A. V. Rakov, Yu. A. Novikov, P. A. Todua, Yu. V. Ozerin, V. P. Gavrilenko

Proceedings Volume 6648, 66480R (2007) https://doi.org/10.1117/12.733134

KEYWORDS: Scanning electron microscopy, Atomic force microscopy, Calibration, Silicon, Electron beams, Atomic force microscope, Electron microscopes, Anisotropic etching, Crystals, Video

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Proceedings Article | 11 January 2007 Paper

Laser interferometry-phasometry of nanodisplacement

Zh. Zhelkobaev, V. Kalendin, M. Samorukov, P. Todua

Proceedings Volume 6594, 65940A (2007) https://doi.org/10.1117/12.725603

KEYWORDS: Calibration, Fabry–Perot interferometers, Interferometers, Interferometry, Laser systems engineering, Radio optics, Metrology, Nanotechnology, Laser stabilization, Laser development

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Proceedings Article | 10 June 2006 Paper

Metrology in linear measurements of nano-object elements

P. Todua, Yu. Novikov, A. Rakov

Proceedings Volume 6260, 626013 (2006) https://doi.org/10.1117/12.683398

KEYWORDS: Scanning electron microscopy, Calibration, Metrology, Chemical elements, Microscopes, Standards development, Electron microscopes, Nanostructures, Atomic force microscopy, Silicon

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Proceedings Article | 10 June 2006 Paper

Linear sizes measurements of relief elements with the width less than 100 nm on a SEM

A. Rakov, P. Todua, Yu. Novikov

Proceedings Volume 6260, 626015 (2006) https://doi.org/10.1117/12.683401

KEYWORDS: Scanning electron microscopy, Stereolithography, Electron microscopes, Critical dimension metrology, Solids, Integrated circuits, Microscopes, Chemical elements, Calibration, Signal processing

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Showing 5 of 22 publications

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