Dr. Peter J. de Groot Profile

Dr. Peter J. de Groot

Scientist Emeritus at Zygo Corporation

SPIE Involvement:

Nominating and Leadership Development Committee | Strategic Planning Committee | Executive Committee | Conference Chair | Conference Program Committee | Author | Editor | Instructor

Area of Expertise:

Interferometry , Optical metrology , Intellectual property protection , R&D management , Science education

Profile Summary

Dr. Peter de Groot invents and develops new optical metrology instruments and applications for Zygo Corporation, in Middlefield, Connecticut. In addition to 140 patents for new optical instruments and techniques, Peter has published 200 technical papers, tutorials, and book chapters in physics, education, optics and metrology. He is active in SPIE as a Director, Fellow member, Committee chair, author, instructor, Kingslake award winner, and 2024 President Elect.

Publications (58)

SPIE Journal Paper | 12 April 2024 Open Access

Open Access

Comparison of Fourier optics-based methods for modeling coherence scanning interferometry

Helia Hooshmand, Tobias Pahl, Peter de Groot, Peter Lehmann, Athanasios Pappas, Rong Su, Richard Leach, Samanta Piano

OE, Vol. 63, Issue 04, 044102, (April 2024) https://doi.org/10.1117/12.10.1117/1.OE.63.4.044102

KEYWORDS: 3D modeling, Optical surfaces, Instrument modeling, Modeling, Equipment, Light sources and illumination, Optical engineering, Interferometry, Imaging systems, 3D metrology

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Proceedings Article | 4 October 2023 Presentation + Paper

Presentation + Paper

Why you should pay attention to international standards in optical metrology

Peter de Groot, Han Haitjema, Mark Malburg

Proceedings Volume 12672, 1267203 (2023) https://doi.org/10.1117/12.2675503

KEYWORDS: Standards development, Equipment, Calibration, Tunable filters, Metrology, Optical surfaces, Optical metrology, Measurement uncertainty, Time metrology, Manufacturing

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Proceedings Article | 4 October 2023 Presentation

Presentation

X-Ray and EUV optics: driving the state of the art in optical metrology

Peter de Groot, Vivek Badami

Proceedings Volume PC12695, PC1269502 (2023) https://doi.org/10.1117/12.2683997

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Proceedings Article | 10 August 2023 Presentation + Paper

Presentation + Paper

Comparison of approximate methods for modelling coherence scanning interferometry

Helia Hooshmand, Tobias Pahl, Peter de Groot, Peter Lehmann, Athanasios Pappas, Rong Su, Richard Leach, Samanta Piano

Proceedings Volume 12619, 126190R (2023) https://doi.org/10.1117/12.2673657

KEYWORDS: 3D modeling, Optical surfaces, Modeling, Equipment, Instrument modeling, Light sources and illumination, Interferometry, Imaging systems, Fourier transforms

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Proceedings Article | 10 August 2023 Presentation + Paper

Presentation + Paper

Modeling the topographic lateral resolution of interferometers

P. de Groot, J. Kramer, T. Sutherland

Proceedings Volume 12619, 126190N (2023) https://doi.org/10.1117/12.2670939

KEYWORDS: Interferometers, Interferometry, Diffraction, Optical resolution, Spatial frequencies, Light sources and illumination, Cameras, Frequency response, Equipment, Modulation transfer functions, Fourier transforms, Spatial resolution, Optical gratings, Imaging systems

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Proceedings Article | 20 May 2022 Presentation + Paper

Presentation + Paper

High resolution, non-contact surface metrology for freeform optics in digital immersive displays

Alex Sohn, Nelson Cardenas, Neil Naples, Xavier Colonna de Lega, Jan Liesener, Thomas Dresel, Peter de Groot

Proceedings Volume 12137, 121370J (2022) https://doi.org/10.1117/12.2624964

KEYWORDS: Metrology, Interferometry, Sensors, Freeform optics, Calibration, Optical spheres, Optical alignment, Surface finishing, Confocal microscopy, Colorimetry, Stitching interferometry

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Proceedings Article | 28 October 2021 Presentation + Paper

Presentation + Paper

Advances in flexible precision aspheric form measurement using axially scanned interferometry

Thomas Dresel, Karta Khalsa, Michael Turzhitsky, Martin Fay, Peter de Groot

Proceedings Volume 11889, 1188905 (2021) https://doi.org/10.1117/12.2602462

KEYWORDS: Aspheric lenses, Optical spheres, Calibration, Distortion, Interferometry, Metrology, Spherical lenses, Imaging systems, Precision measurement, Software development, Aspheric metrology

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SPIE Journal Paper | 18 October 2021 Open Access

Open Access

Modeling of coherence scanning interferometry using classical Fourier optics

Peter de Groot, Xavier Colonna de Lega, Rong Su, Jeremy Coupland, Richard Leach

OE, Vol. 60, Issue 10, 104106, (October 2021) https://doi.org/10.1117/12.10.1117/1.OE.60.10.104106

KEYWORDS: 3D modeling, Interferometry, Fourier optics, Instrument modeling, Optical engineering, Light sources, 3D metrology, Signal detection, Imaging systems, Spatial frequencies

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Proceedings Article | 5 August 2021 Presentation + Paper

Presentation + Paper

Fourier optics modelling of coherence scanning interferometers

Peter de Groot, Xavier Colonna de Lega, Rong Su, Jeremy Coupland, Richard Leach

Proceedings Volume 11817, 118170M (2021) https://doi.org/10.1117/12.2595668

KEYWORDS: 3D modeling, Interferometry, Fourier optics, Instrument modeling, Objectives, Light sources, Microscopes, Diffraction, Spatial frequencies, Interferometers

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Proceedings Article | 1 August 2021 Presentation + Paper

Presentation + Paper

The state of the art in swept-wavelength laser Fizeau interferometry

Leslie Deck, Peter de Groot

Proceedings Volume 11817, 118170N (2021) https://doi.org/10.1117/12.2595455

KEYWORDS: Interferometry, Reflection, Metrology, Interferometers, Phase shifts, Optics manufacturing, Wavelength tuning, Glasses, Phase shifting, Visualization

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Proceedings Article | 24 June 2021 Open Access

Open Access

Presentation

Optical sociology: how organizational culture impacts advances in optical metrology

Peter de Groot

Proceedings Volume 11782, 1178204 (2021) https://doi.org/10.1117/12.2596985

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Proceedings Article | 21 August 2020 Presentation + Paper

Presentation + Paper

Fourier optics modelling of instrument response for interference microscopy

Peter de Groot, Xavier Colonna de Lega

Proceedings Volume 11490, 114900T (2020) https://doi.org/10.1117/12.2569391

KEYWORDS: Interferometers, Systems modeling, Fourier optics, Light sources, Phase shifts, Optical filters, Objectives, Microscopy, Imaging systems

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Proceedings Article | 20 August 2020 Presentation

Presentation

Precision optical metrology of injection molds for aspherical microlenses

Jack DiSciacca, Peter de Groot, Richard Pultar, Xavier Colonna de Lega

Proceedings Volume 11487, 1148714 (2020) https://doi.org/10.1117/12.2569823

KEYWORDS: Microlens, Optical metrology, Metrology, Chemical elements, Cameras, Optical fabrication, Aspheric lenses, Diamond turning, Optical alignment, Microscopy

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SPIE Journal Paper | 27 June 2020

Definition and evaluation of topography measurement noise in optical instruments

Peter de Groot, Jack DiSciacca

OE, Vol. 59, Issue 06, 064110, (June 2020) https://doi.org/10.1117/12.10.1117/1.OE.59.6.064110

KEYWORDS: Data acquisition, Cameras, Signal to noise ratio, Interference (communication), Phase shifts, Optical components, Optical engineering, Microscopes, Image filtering, Standards development

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Proceedings Article | 1 April 2020 Presentation + Paper

Presentation + Paper

Optical topography measurement of steeply-sloped surfaces beyond the specular numerical aperture limit

Matthew Thomas, Rong Su, Peter de Groot, Richard Leach

Proceedings Volume 11352, 1135207 (2020) https://doi.org/10.1117/12.2554568

KEYWORDS: Interferometers, Surface quality testing, Diffraction gratings, Scattering, Modeling, Signal to noise ratio, Spatial frequencies, 3D metrology

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Proceedings Article | 1 April 2020 Paper

Paper

Interferometric measurements of mold-plate assemblies designed for high-volume manufacturing of aspheric microlenses

Jack DiSciacca, Richard Pultar, Xavier Colonna de Lega, Peter de Groot

Proceedings Volume 11352, 113520M (2020) https://doi.org/10.1117/12.2556924

KEYWORDS: Metrology, Aspheric lenses, Lenses, Fizeau interferometers, Interferometry, Diamond turning, Calibration, Surface finishing, Optical testing, High volume manufacturing

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Proceedings Article | 3 September 2019 Paper

Paper

Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Peter de Groot, Xavier Colonna de Lega, Rong Su, Richard Leach

Proceedings Volume 11102, 111020G (2019) https://doi.org/10.1117/12.2526654

KEYWORDS: Interferometry, Modulation transfer functions, Interferometers, Imaging systems, 3D modeling, Spatial frequencies, Diffraction, Reflectivity, Point spread functions, 3D metrology

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Proceedings Article | 3 September 2019 Presentation + Paper

Presentation + Paper

Long-term stability of the wavelength method of height scale calibration for interference microscopy

Danette Fitzgerald, Peter de Groot

Proceedings Volume 11102, 111020K (2019) https://doi.org/10.1117/12.2528155

KEYWORDS: Calibration, Microscopes, Manufacturing, Scanners, Optical filters, Microscopy, Standards development, Error analysis, Capacitance, Sensors

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Proceedings Article | 21 June 2019 Paper

Paper

Optical measurement of ground cylinder lead angle

Peter de Groot, Michael Schmidt, Leslie Deck

Proceedings Volume 11056, 110560X (2019) https://doi.org/10.1117/12.2527788

KEYWORDS: Lead, Optical testing, 3D metrology, Manufacturing, Metrology, Microscopy, 3D acquisition, Interferometry, Tolerancing, Image processing

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Proceedings Article | 7 September 2018 Paper

Paper

Applications of optical coherence in interferometric metrology

Peter de Groot

Proceedings Volume 10834, 108340S (2018) https://doi.org/10.1117/12.2319106

KEYWORDS: Interferometry, Light sources, Coherence (optics), Metrology, Interferometers, Sensors, Cameras, Fiber optics sensors, Fizeau interferometers, Diffusers

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Proceedings Article | 18 August 2018 Presentation + Paper

Presentation + Paper

Surface-height measurement noise in interference microscopy

Peter de Groot, Jack DiSciacca

Proceedings Volume 10749, 107490Q (2018) https://doi.org/10.1117/12.2323900

KEYWORDS: Data acquisition, Interference (communication), Microscopy, Silicon carbide, Microscopes, Signal to noise ratio, Metrology, Surface finishing, Environmental sensing, Image filtering

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Proceedings Article | 7 August 2018 Paper

Paper

Characterizing the resolving power of laser Fizeau interferometers

Torsten Glaschke, Leslie Deck, Peter de Groot

Proceedings Volume 10829, 1082905 (2018) https://doi.org/10.1117/12.2317630

KEYWORDS: Spatial frequencies, Cameras, Fizeau interferometers, Optical transfer functions, Spectral resolution, Laser metrology, Metrology, Error analysis, Optical components, Surface finishing

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Proceedings Article | 21 May 2018 Paper

Paper

Optical metrology for immersive display components and subsystems

Peter de Groot, Leslie Deck

Proceedings Volume 10676, 106760B (2018) https://doi.org/10.1117/12.2317985

KEYWORDS: Metrology, Planar waveguides, Interferometers, Glasses, Optical metrology, Optical components, Interferometry, RGB color model, Cameras, Diamond turning

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SPIE Journal Paper | 8 September 2017 Open Access

Open Access

Special Section Guest Editorial: Interferometry

Peter de Groot, Erik Novak

OE, Vol. 56, Issue 11, 111701, (September 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.11.111701

KEYWORDS: Interferometry, Metrology, Optical engineering, Interferometers, Optics manufacturing, Microscopy, Distance measurement, Physics, Optical fabrication, Speckle

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Proceedings Article | 26 June 2017 Paper

Paper

Measurement, certification and use of step-height calibration specimens in optical metrology

Peter de Groot, Danette Fitzgerald

Proceedings Volume 10329, 1032919 (2017) https://doi.org/10.1117/12.2269800

KEYWORDS: Calibration, Standards development, Interferometry, 3D metrology, Metrology, Optical calibration, Optical metrology, Optical testing, Coherence (optics), Inspection, 3D imaging standards, Profiling, Confocal microscopy, Microscopes

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SPIE Journal Paper | 22 July 2016 Open Access

Open Access

Interference microscope objectives for wide-field areal surface topography measurements

Peter de Groot, James Biegen

OE, Vol. 55, Issue 07, 074110, (July 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.7.074110

KEYWORDS: Objectives, Microscopes, Beam splitters, Microscopy, Interferometers, Mirrors, Reflection, Cameras, Interferometry, Prisms

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Proceedings Article | 22 June 2015 Paper

Paper

A new class of wide-field objectives for 3D interference microscopy

Peter de Groot, James Biegen

Proceedings Volume 9525, 95250N (2015) https://doi.org/10.1117/12.2183628

KEYWORDS: Objectives, Microscopy, Microscopes, Beam splitters, Reflection, Lens design, Mirrors, 3D metrology, Prototyping, Cameras

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Proceedings Article | 21 June 2015 Paper

Paper

Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard

Peter de Groot, Jake Beverage

Proceedings Volume 9526, 952610 (2015) https://doi.org/10.1117/12.2184975

KEYWORDS: Calibration, Microscopes, Data acquisition, Spectroscopy, Interferometers, Scanners, Microscopy, Objectives, Manufacturing, Cameras

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Proceedings Article | 28 May 2014 Paper

Paper

Progress in the specification of optical instruments for the measurement of surface form and texture

Peter de Groot

Proceedings Volume 9110, 91100M (2014) https://doi.org/10.1117/12.2054435

KEYWORDS: Metrology, Standards development, Calibration, Microscopes, Manufacturing, 3D metrology, Optical resolution, Interference (communication), Modulation transfer functions, Confocal microscopy

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Proceedings Article | 27 September 2011 Paper

Paper

Instantaneous measurement Fizeau interferometer with high spatial resolution

Daniel Sykora, Peter de Groot

Proceedings Volume 8126, 812610 (2011) https://doi.org/10.1117/12.894676

KEYWORDS: Spatial resolution, Interferometers, Metrology, Cameras, Imaging systems, Spatial frequencies, Fizeau interferometers, Surface finishing, Image resolution, Sensors

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Proceedings Article | 14 September 2011 Paper

Paper

Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer

Leslie Deck, Peter de Groot

Proceedings Volume 8133, 81330G (2011) https://doi.org/10.1117/12.893461

KEYWORDS: Interferometers, Cameras, Beam splitters, Distortion, Image resolution, Sensors, Monochromatic aberrations, Photovoltaics, Pellicles, Glasses

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Proceedings Article | 24 March 2009 Paper

Paper

Multi-purpose optical profiler for characterization of materials, film stacks, and for absolute topography measurement

X. Colonna de Lega, Martin Fay, Peter de Groot, Boris Kamenev, J. Ryan Kruse, Mitch Haller, Mark Davidson, Lena Miloslavsky, Duncan Mills

Proceedings Volume 7272, 72723Z (2009) https://doi.org/10.1117/12.814629

KEYWORDS: Metrology, Data modeling, Oxides, Microscopes, Reflectivity, Semiconducting wafers, Optical properties, 3D metrology, Polarization, Data storage

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Proceedings Article | 11 August 2008 Paper

Paper

New algorithms and error analysis for sinusoidal phase shifting interferometry

Peter de Groot, Leslie Deck

Proceedings Volume 7063, 70630K (2008) https://doi.org/10.1117/12.795346

KEYWORDS: Phase shifts, Phase shifting, Error analysis, Cameras, Calibration, Sensors, Interference (communication), Phase interferometry, Optical testing, Algorithm development

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Proceedings Article | 11 August 2008 Paper

Paper

Transparent film profiling and analysis by interference microscopy

Peter de Groot, Xavier Colonna de Lega, Martin Fay

Proceedings Volume 7064, 70640I (2008) https://doi.org/10.1117/12.794936

KEYWORDS: 3D metrology, Microscopy, 3D modeling, Interferometry, Profiling, Optical properties, Thin films, Silicon, Interferometers, Multilayers

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Proceedings Article | 25 April 2008 Paper

Paper

Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler

X. Colonna de Lega, Peter de Groot

Proceedings Volume 6995, 69950P (2008) https://doi.org/10.1117/12.782836

KEYWORDS: Microscopes, Silicon, Oxides, Optical properties, Polarization, Refractive index, Data modeling, Interferometry, Objectives, Silica

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Proceedings Article | 10 September 2004 Paper

Paper

Signal modeling for modern interference microscopes

Peter de Groot, Xavier Colonna de Lega

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.546226

KEYWORDS: Spatial frequencies, Microscopes, Thin films, Cameras, Interferometry, Light sources, Fourier transforms, Superposition, Ferroelectric materials, Optical interferometry

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Proceedings Article | 16 August 2004 Paper

Paper

Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

David Grigg, Eric Felkel, John Roth, Xavier Colonna de Lega, Leslie Deck, Peter de Groot

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.546211

KEYWORDS: Microelectromechanical systems, Microscopy, Microopto electromechanical systems, Metrology, Thin films, Interferometry, Ferroelectric materials, Microscopes, Optical microscopy, Defect detection

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Proceedings Article | 2 August 2004 Paper

Paper

Surface profiling using a reference-scanning Mirau interference microscope

Xavier Colonna de Lega, David Grigg, Peter de Groot

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.559893

KEYWORDS: Objectives, Microscopes, Profiling, Beam splitters, Cameras, Mirrors, Signal processing, Interferometry, Interferometers, Light emitting diodes

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SPIE Journal Paper | 1 May 2003

Valve cone measurement using white light interference microscopy in a spherical measurement geometry

Peter de Groot, Xavier Colonna de Lega

OE, Vol. 42, Issue 05, (May 2003) https://doi.org/10.1117/12.10.1117/1.1565350

KEYWORDS: Spherical lenses, Optical testing, Surface finishing, Tolerancing, Cameras, Wavefronts, Optical spheres, Data acquisition, Microscopy, Microscopes

Proceedings Article | 20 June 2002 Paper

Paper

Interferometer design for writing Bragg gratings in optical fibers

Peter de Groot, Xavier Colonna de Lega, Jay Dawson, Trevor MacDougall, Minfu Lu, John Troll

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472247

KEYWORDS: Mirrors, Fiber Bragg gratings, Ultraviolet radiation, Interferometers, Tolerancing, Optical fibers, Luminescence, Optical design, Modulation, Refractive index

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Proceedings Article | 20 June 2002 Paper

Paper

Optical thickness measurement of substrates using a transmitted wavefront test at two wavelengths to average out multiple reflection errors

Peter de Groot

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472217

KEYWORDS: Optical testing, Reflection, Wavefronts, Tunable lasers, Interferometry, Laser interferometry, Fizeau interferometers, Reflectivity, Glasses, Phase interferometry

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Proceedings Article | 19 June 2002 Paper

Paper

Step height measurements using a combination of a laser displacement gage and a broadband interferometric surface profiler

Peter de Groot, Xavier Colonna de Lega, David Grigg

Proceedings Volume 4778, (2002) https://doi.org/10.1117/12.473535

KEYWORDS: Interferometry, Laser interferometry, Profilometers, Infrared radiation, Surface roughness, Interferometers, Profiling, Mirrors, Helium neon lasers, Metals

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SPIE Journal Paper | 1 January 2001

Unusual techniques for absolute distance measurement

Peter de Groot

OE, Vol. 40, Issue 01, (January 2001) https://doi.org/10.1117/12.10.1117/1.1330702

KEYWORDS: Modulation, Distance measurement, Semiconductor lasers, Interferometry, LIDAR, Diodes, Signal detection, Sensors, Interferometers, Laser interferometry

SPIE Journal Paper | 1 January 2000

Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures

Peter de Groot, Xavier Colonna de Lega, Dave Stephenson

OE, Vol. 39, Issue 01, (January 2000) https://doi.org/10.1117/12.10.1117/1.602339

KEYWORDS: Interferometry, Interferometers, Diffraction gratings, Metrology, 3D metrology, Optical testing, Surface roughness, Grazing incidence, Surface finishing, Phase shifts

Proceedings Article | 29 December 1998 Paper

Paper

Characterization of a geometrically desensitized interferometer for flatness testing

Xavier Colonna de Lega, James Biegen, Dave Stephenson, Peter de Groot

Proceedings Volume 3520, (1998) https://doi.org/10.1117/12.334344

KEYWORDS: Diffraction gratings, Interferometers, Diffraction, Reflection, Optical design, Ray tracing, Objectives, Geometrical optics, Instrument modeling, Stray light

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Proceedings Article | 29 December 1998 Paper

Paper

Coherence scanning in a geometrically desensitized interferometer

Leslie Deck, Peter de Groot, Xavier Colonna de Lega

Proceedings Volume 3520, (1998) https://doi.org/10.1117/12.334345

KEYWORDS: Interferometers, Speckle pattern, Speckle, Diffusers, Cameras, Imaging systems, Optical interferometry, Coherence (optics), Metrology, Interferometry

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Proceedings Article | 6 July 1998 Paper

Paper

Adjustable coherence depth in a geometrically desensitized interferometer

Peter de Groot, Leslie Deck, Xavier Colonna de Lega

Proceedings Volume 3479, (1998) https://doi.org/10.1117/12.316446

KEYWORDS: Interferometers, Interferometry, Light, Light sources, Cameras, Glasses, Reflection, Grazing incidence, Superposition, Chlorine

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Proceedings Article | 30 June 1998 Paper

Paper

Interferometric analysis of stress-induced birefringence in a rotating glass disk

Peter de Groot, Ara Dergevorkian, Tod Erickson

Proceedings Volume 3478, (1998) https://doi.org/10.1117/12.312941

KEYWORDS: Birefringence, Glasses, Polarization, Receivers, Phase measurement, Interferometry, Data storage, Optical testing, Molybdenum, Interferometers

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Proceedings Article | 17 September 1997 Paper

Paper

101-frame algorithm for phase-shifting interferometry

Peter de Groot

Proceedings Volume 3098, (1997) https://doi.org/10.1117/12.281171

KEYWORDS: Calibration, Phase shifts, Algorithm development, Error analysis, Phase interferometry, Fourier transforms, Wavefronts, Interference (communication), Spatial frequencies, Charge-coupled devices

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Proceedings Article | 18 September 1996 Paper

Paper

Equivalent wavelength interferometry using diffractive optics

Peter de Groot

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250773

KEYWORDS: Interferometry, Optics manufacturing, Interferometers, Manufacturing

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Proceedings Article | 18 September 1996 Paper

Paper

Optical flying-height testing of magnetic read-write heads

Peter de Groot, Leslie Deck, James Soobitsky, James Biegen

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250775

KEYWORDS: Head, Optical testing, Magnetism, Metrology, Distance measurement, Polarization, Interferometry, In situ metrology

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Proceedings Article | 15 November 1994 Paper

Paper

Surface profiling by frequency-domain analysis of white light interferograms

Peter de Groot, Leslie Deck

Proceedings Volume 2248, (1994) https://doi.org/10.1117/12.194308

KEYWORDS: Interferometry, Interferometers, Profiling, Phase interferometry, Microscopes, Distance measurement, Data acquisition, Data storage, Coherence (optics), Data centers

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Proceedings Article | 15 November 1994 Paper

Paper

Long-wavelength laser diode interferometer for surface flatness measurement

Peter de Groot

Proceedings Volume 2248, (1994) https://doi.org/10.1117/12.194312

KEYWORDS: Interferometers, Semiconductor lasers, Surface finishing, Phase shifts, Interferometry, Phase interferometry, Surface roughness, Wavelength tuning, Polishing, Optical components

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Proceedings Article | 28 May 1993 Paper

Paper

Laser gage using chirped synthetic wavelength interferometry

Peter de Groot, John McGarvey

Proceedings Volume 1821, (1993) https://doi.org/10.1117/12.145530

KEYWORDS: Interferometers, Distance measurement, Interferometry, Mirrors, Laser interferometry, Manufacturing, LIDAR, Frequency modulation, Phase measurement, Profiling

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Proceedings Article | 1 November 1990 Paper

Paper

Interferometric evaluation of lenslet arrays for 2-D phase-locked laser diode sources

Peter de Groot, Francis D'Amato, Edward Gratrix

Proceedings Volume 1333, (1990) https://doi.org/10.1117/12.22819

KEYWORDS: Semiconductor lasers, Diffraction, Micro optics, Diodes, Wavefronts, Mode locking, Optics manufacturing, Interferometry, Gradient-index optics, Optical testing

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Proceedings Article | 1 November 1990 Paper

Paper

Laser diode technologies for in-process metrology

Peter de Groot

Proceedings Volume 1333, (1990) https://doi.org/10.1117/12.22804

KEYWORDS: Semiconductor lasers, Optics manufacturing, Diodes, Metrology, Interferometry, Optical testing, Interferometers, Laser applications, Optical fabrication, Mirrors

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Proceedings Article | 1 October 1990 Paper

Paper

Laser diode backscatter modulation for machine vision

Peter de Groot, Gregg Gallatin

Proceedings Volume 1375, (1990) https://doi.org/10.1117/12.35028

KEYWORDS: Semiconductor lasers, Modulation, Machine vision, Backscatter, Ranging, Information operations, Velocimetry, Lithium, Light scattering, 3D vision

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Proceedings Article | 1 May 1990 Paper

Paper

Applications of optical feedback in laser diodes

Peter de Groot

Proceedings Volume 1219, (1990) https://doi.org/10.1117/12.18284

KEYWORDS: Semiconductor lasers, Modulation, Diodes, Laser applications, Mirrors, Laser optics, Backscatter, Light scattering, LIDAR, Sensors

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Showing 5 of 58 publications

Proceedings Volume Editor (4)

SPIE Conference Volume | 31 May 2022

Optics and Photonics for Advanced Dimensional Metrology II

SPIE Conference Volume | 16 April 2020

Optics and Photonics for Advanced Dimensional Metrology

SPIE Conference Volume | 16 July 2014

Interferometry XVII: Advanced Applications

SPIE Conference Volume | 6 August 1993

Fifth International Conference on Laser Anemometry: Advances and Applications

Conference Committee Involvement (52)

Interferometry and Structured Light 2024

21 August 2024 | San Diego, California, United States

Optical Manufacturing and Testing 2024

20 August 2024 | San Diego, California, United States

Optics and Photonics for Advanced Dimensional Metrology III

9 April 2024 | Strasbourg, France

Optifab 2023

16 October 2023 | Rochester, New York, United States

Applied Optical Metrology V

22 August 2023 | San Diego, California, United States

Digital Optical Technologies 2023

26 June 2023 | Munich, Germany

Optical Measurement Systems for Industrial Inspection XIII

26 June 2023 | Munich, Germany

Interferometry XXI

24 August 2022 | San Diego, California, United States

Optical Manufacturing and Testing XIV

22 August 2022 | San Diego, California, United States

Optics and Photonics for Advanced Dimensional Metrology II

5 April 2022 | Strasbourg, France

Optifab 2021

18 October 2021 | Rochester, New York, United States

Applied Optical Metrology IV

4 August 2021 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection XII

21 June 2021 | Online Only, Germany

Optical Manufacturing and Testing XIII

24 August 2020 | Online Only, California, United States

Interferometry XX

24 August 2020 | Online Only, California, United States

Optics and Photonics for Advanced Dimensional Metrology

6 April 2020 | Online Only, France

Applied Optical Metrology III

13 August 2019 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection XI

24 June 2019 | Munich, Germany

Interferometry XIX

21 August 2018 | San Diego, California, United States

Optical Manufacturing and Testing XII

20 August 2018 | San Diego, California, United States

Optical Micro- and Nanometrology

25 April 2018 | Strasbourg, France

Applied Optical Metrology II

8 August 2017 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection X

26 June 2017 | Munich, Germany

Interferometry XVIII

30 August 2016 | San Diego, California, United States

Optical Micro- and Nanometrology

5 April 2016 | Brussels, Belgium

Optical Manufacturing and Testing XI

9 August 2015 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection IX

22 June 2015 | Munich, Germany

Interferometry XVII: Advanced Applications

19 August 2014 | San Diego, California, United States

Optical Micro- and Nanometrology

15 April 2014 | Brussels, Belgium

Optical Manufacturing and Testing X

26 August 2013 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection VIII

13 May 2013 | Munich, Germany

Interferometry XVI: Applications

14 August 2012 | San Diego, California, United States

Optical Micro- and Nanometrology

16 April 2012 | Brussels, Belgium

Optical Manufacturing and Testing IX

22 August 2011 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection

23 May 2011 | Munich, Germany

Interferometry XV: Applications

3 August 2010 | San Diego, California, United States

Optical Micro- and Nanometrology

13 April 2010 | Brussels, Belgium

Optical Manufacturing and Testing VIII

4 August 2009 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection

16 June 2009 | Munich, Germany

Interferometry XIV: Applications

13 August 2008 | San Diego, California, United States

Optical Micro- and Nanometrology in Microsystems Technology

8 April 2008 | Strasbourg, France

Optical Manufacturing and Testing VII

28 August 2007 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection

18 June 2007 | Munich, Germany

Interferometry XIII: Applications

16 August 2006 | San Diego, California, United States

Optical Micro- and Nanometrology in Microsystems Technology

5 April 2006 | Strasbourg, France

Optical Manufacturing and Testing VI

31 July 2005 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection IV

13 June 2005 | Munich, Germany

Interferometry XII: Applications

4 August 2004 | Denver, Colorado, United States

Optical Metrology in Production Engineering

27 April 2004 | Strasbourg, France

Optical Manufacturing and Testing V

3 August 2003 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection III

23 June 2003 | Munich, Germany

Laser Anemometry: Advances and Applications--Fifth International Conference

23 August 1993 | Koningshof, Veldhoven, Netherlands

Showing 5 of 52 Conference Committees

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