Petra M. Schmitt
at CNES
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 December 2003 Paper
Petra Schmitt, Francis Pressecq, Guy Perez, Xavier Lafontan, Jean Marc Nicot, Daniel Esteve, Jean Yves Fourniols, Henri Camon, Coumar Oudea
Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524575
KEYWORDS: Microelectromechanical systems, Reliability, Commercial off the shelf technology, Finite element methods, 3D modeling, Physics, Failure analysis, Profilometers, Capacitance, Material characterization

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