Mr. Po-Jung Huang Profile

Po-Jung Huang

at National Taiwan Univ

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 15 October 2014 Paper

Making hexagonal electrodes on Nafion for deformable mirrors applications

Po-Jung Huang, Guo-Dung Su

Proceedings Volume 9202, 92021A (2014) https://doi.org/10.1117/12.2061351

KEYWORDS: Deformable mirrors, Electrodes, Ions, Resistance, Metals, Platinum, Photoresist materials, Microelectromechanical systems, Polymers, Plating

Read Abstract +

In this paper, a fabrication of IPMC (Ionic Polymer Metal Composites) films with hexagonal electrodes for deformable mirrors applications has been described. With the array of hexagonal electrodes on one side of IPMC membrane, we can control the contour of IPMC by driving voltage selectively. Our fabrication process involves ion-exchange, lithography, and electroless plating steps. A positive photoresist in photolithography is used as the mask in the electroless plating process to selectively grow platinum electrodes in IPMC regions. We have measured the surface resistance of the IPMC. The surface resistance of the hexagonal electrodes is about 5Ω, which is small enough to enable the IPMC to be actuated by low voltage. The other side of the IPMC membrane is smooth and can be used as reflection surface. We have generated deformation on our IPMCs (5 cm X 5 cm) under a low actuation voltage less than 5 volts successfully. The maximum stroke of the IPMC deformable mirror is about 25 um. Due to the low driving voltage of IPMCs, the deformable mirrors made of IPMCs is promising.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years