Dr. Prem Kumar Panneerchelvam Profile

Dr. Prem Kumar Panneerchelvam

at KLA Texas

SPIE Involvement:

Conference Program Committee | Author

Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper

Process optimization for shallow trench isolation etch using computational models

Shuo Huang, Prem Panneerchelvam, Chad Huard, Shyam Sridhar, Peter L. Ventzek, Mark Smith

Proceedings Volume 12499, 1249905 (2023) https://doi.org/10.1117/12.2664977

KEYWORDS: Etching, Plasma, Calibration, Mathematical optimization, Inverse problems, Plasma etching, Silicon, 3D modeling, Modeling, Semiconducting wafers

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Proceedings Article | 26 May 2022 Paper

Trilayer hardmask lithography and etch for BEOL manufacturing

Prem Panneerchelvam, Chad Huard, Ankur Agarwal, Alessandro Vaglio Pret, Antonio Mani, Roel Gronheid, Marc Demand, Kaushik Kumar

Proceedings Volume 12053, 1205320 (2022) https://doi.org/10.1117/12.2614095

KEYWORDS: Etching, System on a chip, Plasma, Lithography, Semiconducting wafers, Photoresist materials, 3D modeling, Back end of line, Numerical simulations

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Conference Committee Involvement (3)

Advanced Etch Technology and Process Integration for Nanopatterning XIV

23 February 2025 | San Jose, California, United States

Advanced Etch Technology and Process Integration for Nanopatterning XIII

26 February 2024 | San Jose, California, United States

Advanced Etch Technology and Process Integration for Nanopatterning XII

28 February 2023 | San Jose, California, United States

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