Aluminum (Al)-based metal-dielectric composite coatings play a crucial role in the production of vacuum ultraviolet (VUV) optical components and laser systems. In the short-wavelength range of the VUV region, there is a high demand for practical Al-based coatings with high reflectivity, which imposes strict requirements on the preparation process. Key parameters of the preparation process, such as deposition rate, film thickness, and deposition temperature, significantly influence the growth and short-wavelength VUV optical properties of the coatings. In this study, we utilized electron-beam evaporation technology to prepare magnesium fluoride (MgF2) protected Al coatings for short-wavelength VUV reflection. We explored the impact of the aforementioned key process factors on the coatings’ properties and improved the reflectivity of the coatings in the short-wavelength VUV range, achieving reflectivity above 85% at the wavelength of 121.6 nm.
The effects of femtosecond laser (wavelength 1035nm, pulse duration 400 fs, pulse repetition rate 1kHz) on the material removal threshold of superalloy was experimentally investigated, specifically the influence of pulse number irradiated on the threshold of superalloy. Irregular bulge structures were found at the bottom of ablation holes. Two sets of material removal thresholds are derived from the value of hole diameter and depth, which are 0.506 J/cm2 , 0.245 J/cm2 , 0.124 J/cm2 , 0.102 J/cm2 , 0.096 J/cm2 and 0.141 J/cm2 , 0.130 J/cm2 , 0.031 J/cm2 , 0.026 J/cm2 , 0.091 J/cm2 for diameter derivation and depth derivation, respectively, for 1, 10, 100, 500 and 1000 pulses. The deduced two sets of thresholds show similar behavior that the threshold sharply decreases with the pulse number and levels out as the pulse number exceeds 100. The phenomenon is due to incubation effects of multi-pulse irradiation on the surface of superalloy and the incubation coefficient for the thresholds calculated by diameter and depth is fitted to be ~0.72 and ~0.77.
Due to the complexity and inhomogeneity of the distribution of the middle-spatial frequency errors (MSFE), the existing theoretical models cannot realize the manufacturability prediction of the smoothing process for the MSFE on the largeaperture optical components. Therefore, based on the parameterized time-domain smoothing model and the idea of regional division, a prediction algorithm suitable for the smoothing process of the MSFE in complex periods is proposed in this paper. The relevant verifiable experiments are carried out. The prediction results are in good agreement with the real data, which indicates that the prediction algorithm proposed in this paper can be applied to predict the smoothing process of the MSFE of large-aperture optical components and guide the polishing process.
Magnetorheological finishing (MRF) has been widely used in the field of modern optical machining due to the high certainty of processing. In the processing of spherical components, the detection means and sample preparation limit the acquisition of magnetorheological spherical tool influence function. In order to realize the high precision manufacturing of spherical components, the spherical removal function in the magneto-rheological polishing process is simulated and applied in practice. Based on the Preston equation, the material removal of the planar component was analyzed and the plane tool influence function model was established. On this basis, the correlation between spherical removal and plane removal was analyzed, and a simplified spherical tool influence function simulation method was proposed, and its accuracy was verified by experiments. Aiming at the processing of spherical components, the processing technology was improved and the actual processing was carried out. After processing, the PV value of the transmitted wavefront was 0.09λ, and the RMS value was 3.2 nm. The experimental results show that the spherical tool influence function simulated in this paper can be applied in actual processing and obtain a high-quality optical surface.
In this study, silicon carbide ceramic (SiC) was processed by a high repetition frequency femtosecond laser with a wavelength of 1030 nm. We have analyzed the affection of different parameters to the material removal rate and researched surface oxidation phenomenon during laser scanning. The surface oxidation phenomenon is a major factor that affects the material removal rate of SiC ceramic and may even lead to failure of material removal. The oxidation phenomenon of the processing area is directly related to the laser induced temperature rise. Increasing laser scanning speed and increasing laser scanning interval are effective methods to reduce the oxidation phenomenon. The experiments have demonstrated that high-speed processing of SiC ceramic by high repetition frequency femtosecond laser is available under certain parameters.
Nanosecond UV laser-induced surface damage of potassium dihydrogen phosphate samples was investigated and discussed by means of defect characterization, in situ damage test, as well as pump–probe shadowgraph imaging. Two distinctive types of surface damage induced by different defects have been demonstrated. Surface damage occurring at relative lower fluence (typically below 5 J / cm2 in our experiment) is highly correlated with fluorescent surface defects, which are considered as fractural structures introduced by surface cutting. The other type of surface damage that always occurs at higher fluence (above 8 J / cm2) is confirmed to originate from the bulk damage precursor located near the crystal surface.
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