Recently, it has been reported, through using an in-situ laser exposure, nano holed structures can be created on the GaAs surface that is pre-capped by a thin InAs wetting layer and such nano holes were further proven to well serve as the preferential nucleation sites of InAs quantum dots (QDs). In this paper, we presented a study of how to further modify the morphology of the nano holes. First homo-deposition of 500nm GaAs buffer layer on GaAs (100) substrate and after capping of 0.5ML InAs, the as-prepared surface was in-situ exposed by a laser shot with energy of 20mJ. Then four different samples (A-D) were prepared, respectively corresponding to directly finishing the growth for sample A, for sample B repeating one cycle of “0.3ML InAs wetting layer capping + in situ laser exposure” before finishing the whole growth, two cycles for sample C and three cycles for sample D. It is found the density of nano holes on sample A is merely 5.5×108/cm2 with relatively small size possessing an average depth and width at 0.9nm and 36.6nm. After one cycle of “0.3ML InAs wetting layer capping + in situ laser exposure”, the density of nano holes on sample B increases by nearly one order of magnitude to 4.33×109/cm2 and the average depth and width become 1.0nm and 44.6nm. Further after two and three cycles, the resulting density would rise to 8.53 × 109/cm2 (sample C) and 1.12 × 1010/cm2 (sample D), correspondingly, the average depth/width are magnified to 1.1nm/54.2nm and 1.3nm/59.7nm. Hence, we have demonstrated an effective approach to modify the in-situ laser nano-holed patterning of GaAs surface which is supposed to have promising applications in controlled growth of QDs.
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