Dr. Ravi K. Bonam
at IBM Research
SPIE Involvement:
Author
Publications (18)

SPIE Journal Paper | 1 July 2020 Open Access
JM3, Vol. 19, Issue 03, 034001, (July 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.3.034001
KEYWORDS: Stochastic processes, Fiber optic illuminators, Line edge roughness, Critical dimension metrology, Defect inspection, Extreme ultraviolet, Inspection, Optical lithography, Yield improvement

SPIE Journal Paper | 20 April 2020 Open Access
Dhruv Patel, Ravi Bonam, Assad Oberai
JM3, Vol. 19, Issue 02, 024801, (April 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.2.024801
KEYWORDS: Data modeling, Convolution, Semiconductors, Defect detection, Performance modeling, Semiconducting wafers, Image classification, Inspection, Content addressable memory, Process modeling

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11323, 113230O (2020) https://doi.org/10.1117/12.2551487
KEYWORDS: Stochastic processes, Line edge roughness, Inspection, Defect inspection, Critical dimension metrology, Extreme ultraviolet, Optical lithography, Etching, Bridges

Proceedings Article | 26 March 2019 Presentation + Paper
Proceedings Volume 10957, 109570L (2019) https://doi.org/10.1117/12.2515071
KEYWORDS: Photomasks, Semiconducting wafers, Image processing, Extreme ultraviolet lithography, Electron beam lithography, Stochastic processes, Inspection, Line edge roughness, Extreme ultraviolet, Optical proximity correction

Proceedings Article | 26 March 2019 Paper
Dhruv Patel, Ravi Bonam, Assad Oberai
Proceedings Volume 10959, 1095910 (2019) https://doi.org/10.1117/12.2515065
KEYWORDS: Convolution, Defect detection, Semiconducting wafers, Inspection, Neural networks, Image classification, Semiconductors, Convolutional neural networks

Showing 5 of 18 publications
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